Changes in Zygo Corporation Ownership Interest in Subsidiary (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended	12 Months Ended
Sep. 30, 2012	Jun. 30, 2013
Changes In Ownership Interest In Subsidiary [Abstract]
Purchasе of subsidiary sharеs from noncontrolling intеrеst	$ 3,155	$ 3,155

Amount of Purchase of subsidiary shares from non controlling interest.

No definition available.

Name:	zigo_PurchaseOfSubsidiarySharesFromNoncontrollingInterest
Namespace Prefix:	zigo_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration