QUARTERLY RESULTS (Unaudited) (Tables)

12 Months Ended

Jun. 30, 2013

Quarterly Financial Information Disclosure [Abstract]

Schedule of Quarterly Financial Information [Table Text Block]

The following table sets forth certain unaudited quarterly financial data:

	For the Fiscal Year Ended June 30, 2013
	September 30		December 31		March 31		June 30
Net revenue	$	40,206	$	34,635	$	34,533	$	40,021
Gross profit	$	17,493	$	15,283	$	15,260	$	17,655
Net earnings	$	2,994	$	1,682	$	1,532	$	2,772
Net earnings attributable to Zygo Corporation	$	2,388	$	1,579	$	1,366	$	2,518
Net earnings attributable to Zygo Corporation per basic common share	$	0.13	$	0.09	$	0.07	$	0.14
Net earnings attributable to Zygo Corporation per diluted common share	$	0.13	$	0.08	$	0.07	$	0.13

	For the Fiscal Year Ended June 30, 2012
	September 30		December 31		March 31		June 30
Net revenue	$	43,992	$	40,040	$	38,472	$	44,333
Gross profit	$	21,617	$	19,642	$	19,440	$	21,011
Net earnings	$	6,976	$	6,757	$	5,926	$	25,412
Net earnings attributable to Zygo Corporation	$	6,469	$	6,178	$	5,407	$	24,964
Net earnings attributable to Zygo Corporation per basic common share	$	0.36	$	0.34	$	0.30	$	1.37
Net earnings attributable to Zygo Corporation per diluted common share	$	0.35	$	0.33	$	0.29	$	1.32