SEGMENT AND MAJOR CUSTOMER INFORMATION (Tables)

12 Months Ended

Jun. 30, 2013

Segment Reporting [Abstract]

Schedule of Segment Reporting Information, by Segment [Table Text Block]

	Fiscal Year Ended June 30,
	2013			2012			2011
Metrology Solutions
Net revenue	$	93,568		$	106,189		$	92,947
Gross profit		50,619			61,523			50,913
Gross margin		54	%		58	%		55	%
Optical Systems
Net revenue	$	55,827		$	60,648		$	57,179
Gross profit		15,072			20,187			19,880
Gross margin		27	%		33	%		35	%
Total
Net revenue	$	149,395		$	166,837		$	150,126
Gross profit		65,691			81,710			70,793
Gross margin		44	%		49	%		47	%

Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]

Revenue by geographic area based on shipping destination is as follows:

	Fiscal Year Ended June 30,
	2013		2012		2011
Americas	$	79,506	$	90,289	$	81,710
Japan		26,396		26,084		31,648
China		17,245		21,806		9,186
Europe		18,192		19,499		17,983
Pacific Rim		8,056		9,159		9,599
Total	$	149,395	$	166,837	$	150,126