SHARE-BASED COMPENSATION PLANS (Tables)

12 Months Ended

Jun. 30, 2013

Disclosure of Compensation Related Costs, Share-based Payments [Abstract]

Share Based Compensation Arrangement by Share based Payment Award Fair Value Assumptions and Methodology [Table Text Block]

The table below indicates the key assumptions used in the option valuation calculations for options granted in fiscal 2013, 2012 and 2011, and a discussion of the methodology for developing each of the assumptions used in the valuation model:

	Fiscal Year Ended June 30,
	2013			2012	2011
	Minimum	Maximum			Minimum	Maximum
Term			7.3 Years	6.6 Years	4.1	5.1 Years
Volatility			59.2%	59.5%	45.7	57.1%
Dividend yield			0.0%	0.0%			0.0%
Risk-free interest rate	1.2	1.4%		1.5%	1.1	2.6%

Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]

The following table summarizes information about the stock options granted under share-based compensation plans for fiscal 2013, 2012 and 2011. Included in the information below are outstanding options from the Zygo Corporation Amended and Restated Non-Qualified Stock Option Plan which expired in fiscal 2003 and the 2002 Plan which expired in August 2012, in both instances, to the extent the options remain exercisable.

	June 30, 2013					June 30, 2012					June 30, 2011
	Shares Covered by Options			Weighted Average Exercise Price		Shares Covered by Options			Weighted Average Exercise Price		Shares Covered by Options			Weighted Average Exercise Price
Options - Outstanding at beginning of year		1,244,897		$	11.03		1,436,240		$	10.57		1,976,892		$	20.14
Granted		172,934		$	18.36		229,562		$	12.47		100,000		$	12.13
Exercised		(120,219	)	$	10.05		(365,642	)	$	9.79		(166,852	)	$	10.05
Expired or cancelled		(20,309	)	$	11.71		(55,263	)	$	12.87		(473,800	)	$	51.07
Options - Outstanding at end of year		1,277,303		$	12.11		1,244,897		$	11.03		1,436,240		$	10.57
Options vested or expected to vest		479,548		$	13.88		548,144		$	11.20		1,402,221		$	10.56
Options - Exercisable at end of year		785,024		$	10.96		681,185		$	10.87		925,990		$	10.70

Schedule Of Stock Options Granted Under Share-Based Compensation Plans [Table Text Block]

The following table summarizes information about our stock options granted under our share-based compensation plans as of June 30, 2013.

			Options Outstanding						Options Exercisable
Range of Exercise Prices			Number Outstanding as of June 30, 2013		Weighted Average Remaining Contractual Life		Weighted Average Exercise Price		Number Exercisable as of June 30, 2013		Weighted Average Exercise Price
Minimum		Maximum
$ 5.09	-	$  8.80		162,800		6.4	$	6.91		117,800	$	6.67
$ 9.01	-	$12.51		749,149		6.1	$	11.10		503,899	$	10.80
$12.53	-	$14.74		101,600		2.3	$	13.51		101,600	$	13.51
$14.82	-	$20.09		263,754		8.1	$	17.65		61,725	$	16.29
$ 5.09	-	$20.09		1,277,303		6.3	$	12.11		785,024	$	10.96

Schedule of Share-based Compensation, Restricted Stock Units Award Activity [Table Text Block]

The following table summarizes information about restricted stock units granted under share-based compensation plans for the fiscal years ended June 30, 2013, 2012, and 2011:

	June 30, 2013					June 30, 2012					June 30, 2011
	Shares			Weighted Average Fair Value		Shares			Weighted Average Fair Value		Shares			Weighted Average Fair Value
Non vested balance at beginning of year		734,332		$	9.92		713,975		$	8.00		588,093		$	9.04
Granted		162,901		$	18.49		176,812		$	13.78		362,500		$	8.28
Vested		(233,136	)	$	9.61		(148,500	)	$	11.39		(172,865	)	$	8.89
Forfeited		(10,186	)	$	10.69		(7,955	)	$	6.43		(63,753	)	$	9.06
Non vested balance at end of year		653,911		$	12.15		734,332		$	9.92		713,975		$	8.00