CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2011
Net revenue	$ 149,395	$ 166,837	$ 150,126
Cost of goods sold	83,704	85,127	79,333
Gross profit	65,691	81,710	70,793
Selling, general and administrative expenses	34,881	35,486	34,705
Research, development and engineering expenses	18,697	16,501	14,990
Operating profit	12,113	29,723	21,098
Other income (expense):
Interest income	17	61	26
Miscellaneous income (expense), net	(261)	(540)	784
Total other income (expense)	(244)	(479)	810
Earnings from continuing operations before income tax expense, including noncontrolling interest(s)	11,869	29,244	21,908
Income tax benefit (expense) (note 16)	(2,889)	15,827	(1,316)
Net earnings from continuing operations	8,980	45,071	20,592
Net earnings from discontinued operations, net of tax (note 21)			91
Net earnings including noncontrolling interest(s)	8,980	45,071	20,683
Less: Net earnings attributable to noncontrolling interest(s)	1,129	2,053	1,604
Net earnings attributable to Zygo Corporation	7,851	43,018	19,079
Basic - Earnings per share attributable to Zygo Corporation:
Continuing operations (in Dollars per share)	$ 0.43	$ 2.39	$ 1.08
Discontinued operations (in Dollars per share)
Net earnings per share (in Dollars per share)	$ 0.43	$ 2.39	$ 1.08
Diluted - Earnings per share attributable to Zygo Corporation:
Continuing operations (in Dollars per share)	$ 0.41	$ 2.30	$ 1.05
Discontinued operations (in Dollars per share)
Net earnings per share (in Dollars per share)	$ 0.41	$ 2.30	$ 1.05
Weighted average number of shares:
Basic (in Shares)	18,454,476	18,014,325	17,638,635
Diluted (in Shares)	19,106,362	18,711,294	18,140,374
Amounts Attributable to Zygo Corporation
Net earnings from continuing operations attributable to Zygo Corporation	7,851	43,018	18,988
Discontinued operations, net of tax (note 21)			91
Net earnings attributable to Zygo Corporation	$ 7,851	$ 43,018	$ 19,079