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ACQUISITIONS (Tables)
12 Months Ended
Jun. 30, 2013
ACQUISITIONS (Tables) [Line Items]  
Schedule of Consideration Paid for Business and Fair Values of Assets Acquired [Table Text Block] The following table summarizes the consideration paid for the business and the final fair values of the assets acquired at the date of acquisition:

    Final Fair Value as
of June 30, 2011
 
Consideration:        
Cash   $ 7,142  
Future consideration     5,333  
Purchase price   $ 12,475  
         
Assets Acquired:        
Inventories   $ 2,399  
Property and equipment     11,474  
Technology and customer relationships     623  
Total assets     14,496  
Less: gain on acquisition     2,021  
Purchase price   $ 12,475  
Schedule of Finite-Lived Intangible Assets [Table Text Block] Intangible assets, at cost, at June 30, 2013 and 2012 were as follows:

    June 30, 2013     June 30, 2012     Estimated Useful Life (Years)
Minimum
Maximum
 
                         
Patents   $ 7,198     $ 6,934     5
17
 
Customer relationships and technology     2,051       2,163     3
7
 
Covenant not-to-compete           851        
4
      9,249       9,948          
Accumulated amortization     (4,634 )     (4,750 )        
Total   $ 4,615     $ 5,198          
Richmond, California [Member]
 
ACQUISITIONS (Tables) [Line Items]  
Schedule of Finite-Lived Intangible Assets [Table Text Block] The following table presents certain information regarding the intangible assets acquired from ASML as of June 30, 2011.

    Customer
Relationships
    Technology     Total  
                         
Balance at November 12, 2010   $ 23     $ 600     $ 623  
                         
Accumulated amortization     (3 )     (76 )     (79 )
                         
Balance at June 30, 2011   $ 20     $ 524     $ 544