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Segment and Major Customer Information (Tables)
3 Months Ended
Mar. 31, 2013
Schedule of Segment Reporting Information, by Segment [Table Text Block] The following table sets forth segment net revenue, gross profit and gross margin for the three and nine months ended March 31, 2013 and 2012:
    Three Months Ended March 31,     Nine Months Ended March 31,  
    2013     2012     2013     2012  
Metrology Solutions                                
Net revenue   $ 21,273     $ 24,161     $ 68,566     $ 79,482  
Gross profit   $ 11,796     $ 14,033     $ 37,724     $ 46,474  
Gross margin     55 %     58 %     55 %     58 %
                                 
Optical Systems                                
Net revenue   $ 13,260     $ 14,311     $ 40,808     $ 43,022  
Gross profit   $ 3,464     $ 5,407     $ 10,312     $ 14,225  
Gross margin     26 %     38 %     25 %     33 %
                                 
Total                                
Net revenue   $ 34,533     $ 38,472     $ 109,374     $ 122,504  
Gross profit   $ 15,260     $ 19,440     $ 48,036     $ 60,699  
Gross margin     44 %     51 %     44 %     50 %
Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block] The following table sets forth revenue by geographic area:
    Three Months Ended March 31,     Nine Months Ended March 31,  
    2013     2012     2013     2012  
Americas   $ 18,744     $ 18,270     $ 57,361     $ 64,730  
Japan     6,728       7,228       18,395       19,707  
China     2,619       5,288       13,655       15,191  
Europe     4,914       5,093       14,134       15,199  
Pacific Rim     1,528       2,593       5,829       7,677  
Total   $ 34,533     $ 38,472     $ 109,374     $ 122,504