Shareholders' Equity (Tables)

3 Months Ended

Mar. 31, 2013

Schedule of Stockholders Equity [Table Text Block]

The following table sets forth shareholders’ equity and noncontrolling interest for the nine months ended March 31, 2013 and 2012:

	Nine Months Ended March 31,
	2013									2012
		Shareholders’ Equity Zygo Corp.			Non-Controlling Interest			Total Equity			Shareholders’ Equity Zygo Corp.			Non-Controlling Interests			Total Equity
Equity, beginning of period	$	173,625		$	2,355		$	175,980		$	124,720		$	3,367		$	128,087
Net income		5,333			875			6,208			18,054			1,605			19,659
Foreign currency translation effect		(337	)		79			(258	)		(848	)		(159	)		(1,007	)
Total		4,996			954			5,950			17,206			1,446			18,652
Share-based compensation		4,620			—			4,620			3,332			—			3,332
Repurchase of restricted stock		(1,176	)		—			(1,176	)		(401	)		—			(401	)
Employee stock purchase		40			—			40			—			—			—
Exercise of employee stock options and related tax effect		1,066			—			1,066			2,882			—			2,882
Dividends attributable to noncontrolling interests		—			(1,101	)		(1,101	)		—			(2,192	)		(2,192	)
Purchase of subsidiary shares from noncontrolling interest		(2,777	)		(378	)		(3,155	)		—			—			—
Equity, end of period	$	180,394		$	1,830		$	182,224		$	147,739		$	2,621		$	150,360