CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	3 Months Ended		9 Months Ended
	Mar. 31, 2013	Mar. 31, 2012	Mar. 31, 2013	Mar. 31, 2012
Net revenue	$ 34,533	$ 38,472	$ 109,374	$ 122,504
Cost of goods sold	19,273	19,032	61,338	61,805
Gross profit	15,260	19,440	48,036	60,699
Selling, general and administrative expenses	9,362	8,702	26,451	26,272
Research, development and engineering expenses	4,990	4,017	14,073	12,166
Operating profit	908	6,721	7,512	22,261
Other income (expense)
Miscellaneous income (expense), net	(266)	(23)	(438)	(221)
Total other income (expense)	(266)	(23)	(438)	(221)
Income before income taxes, including noncontrolling interests	642	6,698	7,074	22,040
Income tax benefit (expense)	890	(772)	(866)	(2,381)
Net income including noncontrolling interests	1,532	5,926	6,208	19,659
Less: Net income attributable to noncontrolling interests	166	519	875	1,605
Net income attributable to Zygo Corporation	$ 1,366	$ 5,407	$ 5,333	$ 18,054
Earnings per share attributable to Zygo Corporation
Basic earnings per share (in Dollars per share)	$ 0.07	$ 0.30	$ 0.29	$ 1.01
Diluted earnings per share (in Dollars per share)	$ 0.07	$ 0.29	$ 0.28	$ 0.97
Weighted average shares outstanding
Basic shares (in Shares)	18,505,621	18,116,470	18,433,765	17,947,928
Diluted shares (in Shares)	19,126,198	18,883,151	19,079,505	18,640,094