Changes in Zygo Corporation's Ownership Interest in Subsidiary (Detail) - Equity of changes in ownership interest (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2012	Dec. 31, 2011
Net income attributable to Zygo Corporation	$ 1,579	$ 6,178	$ 3,967	$ 12,647
Transfers to the noncontrolling interest
Decrease in Zygo Corporation paid in-capital for purchase of noncontrolling interest			2,749
Net transfers to noncontrolling interest			2,749
Change from net income attributable to Zygo Corporation shareholders and transfers to noncontrolling interest			$ 1,218	$ 12,647