Segment and Major Customer Information (Tables)

6 Months Ended

Dec. 31, 2012

Schedule of Segment Reporting Information, by Segment [Table Text Block]

The following table sets forth segment net revenues, gross profit and gross margin for the three and six months ended December 31, 2012 and 2011:

	Three Months Ended December 31,						Six Months Ended December 31,
	2012			2011			2012			2011
Metrology Solutions
Net revenues	$	21,416		$	25,479		$	47,294		$	55,321
Gross profit	$	11,595		$	15,057		$	25,928		$	32,440
Gross margin		54	%		59	%		55	%		59	%
Optical Systems
Net revenues	$	13,219		$	14,561		$	27,547		$	28,711
Gross profit	$	3,688		$	4,585		$	6,848		$	8,819
Gross margin		28	%		31	%		25	%		31	%
Total
Net revenues	$	34,635		$	40,040		$	74,841		$	84,032
Gross profit	$	15,283		$	19,642		$	32,776		$	41,259
Gross margin		44	%		49	%		44	%		49	%

Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]

The following table sets forth revenues by geographic area:

	Three Months Ended December 31,				Six Months Ended December 31,
	2012		2011		2012		2011
Americas	$	19,755	$	22,170	$	38,618	$	46,461
Japan		5,336		5,692		11,667		12,479
China		3,498		3,823		11,036		9,903
Europe		4,397		5,834		9,219		10,105
Pacific Rim		1,649		2,521		4,301		5,084
Total	$	34,635	$	40,040	$	74,841	$	84,032