Shareholders' Equity (Tables)

6 Months Ended

Dec. 31, 2012

Schedule of Stockholders Equity [Table Text Block]

The following table sets forth shareholders’ equity and noncontrolling interest for the six months ended December 31, 2012 and 2011:

	Six Months Ended December 31,
	2012									2011
	Shareholders’ Equity			Non- Controlling			Total			Shareholders’ Equity			Non- Controlling			Total
	Zygo Corp.			Interest			Equity			Zygo Corp.			Interests			Equity
Equity, beginning of period	$	173,625		$	2,355		$	175,980		$	124,720		$	3,367		$	128,087
Net income		3,967			709			4,676			12,647			1,086			13,733
Foreign currency translation effect		261			104			365			(982	)		(261	)		(1,243	)
Total		4,228			813			5,041			11,665			825			12,490
Share based compensation		3,988			—			3,988			2,318			—			2,318
Repurchase of restricted stock		(1,078	)		—			(1,078	)		(301	)		—			(301	)
Employee Stock Purchase		15			—			15			—			—			—
Exercise of employee stock options and related tax effect		868			—			868			1,221			—			1,221
Dividends attributable to noncontrolling interests		—			(1,101	)		(1,101	)		—			(746	)		(746	)
Purchase of subsidiary shares from noncontrolling interest		(2,777	)		(378	)		(3,155	)		—			—			—
Equity, end of period	$	178,869		$	1,689		$	180,558		$	139,623		$	3,446		$	143,069