CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2010
Net revenue	$ 166,837	$ 150,126	$ 101,330
Cost of goods sold	85,127	79,333	59,361
Gross profit	81,710	70,793	41,969
Selling, general and administrative expenses	35,486	34,705	29,520
Research, development and engineering expenses	16,501	14,990	14,284
Impairment of goodwill			2,003
Operating profit (loss)	29,723	21,098	(3,838)
Other income (expense):
Interest income	61	26	87
Miscellaneous income (expense), net	(540)	784	51
Total other income (expense)	(479)	810	138
Earnings (loss) from continuing operations before income tax expense, including noncontrolling interest	29,244	21,908	(3,700)
Income tax benefit (expense) (note 15)	15,827	(1,316)	1,032
Net earnings (loss) from continuing operations	45,071	20,592	(2,668)
Net earnings (loss) from discontinued operations, net of tax (note 20)		91	(2,669)
Net earnings (loss) including noncontrolling interests	45,071	20,683	(5,337)
Less: Net earnings attributable to noncontrolling interests	2,053	1,604	957
Net earnings (loss) attributable to Zygo Corporation	43,018	19,079	(6,294)
Basic - Earnings (loss) per share attributable to Zygo Corporation:
Continuing operations (in Dollars per share)	$ 2.39	$ 1.08	$ (0.21)
Discontinued operations (in Dollars per share)			$ (0.16)
Net earnings (loss) per share (in Dollars per share)	$ 2.39	$ 1.08	$ (0.37)
Diluted - Earnings (loss) per share attributable to Zygo Corporation:
Continuing operations (in Dollars per share)	$ 2.30	$ 1.05	$ (0.21)
Discontinued operations (in Dollars per share)			$ (0.16)
Net earnings (loss) per share (in Dollars per share)	$ 2.30	$ 1.05	$ (0.37)
Weighted average number of shares:
Basic (in Shares)	18,014,325	17,638,635	17,183,224
Diluted (in Shares)	18,711,294	18,140,374	17,183,224
Amounts Attributable to Zygo Corporation
Net earnings (loss) from continuing operations attributable to Zygo Corporation	43,018	18,988	(3,625)
Discontinued operations, net of tax (note 20)		91	(2,669)
Net earnings (loss) attributable to Zygo Corporation	$ 43,018	$ 19,079	$ (6,294)