ACQUISITIONS (Tables)

12 Months Ended

Jun. 30, 2012

Schedule Of Consideration Paid For Business And Fair Values Of Assets Acquired [Table Text Block]

The following table summarizes the consideration paid for the business and the final fair values of the assets acquired at the date of acquisition:

	Final Fair Value as of June 30, 2011
Consideration:
Cash	$	7,142
Future consideration		5,333
Purchase price	$	12,475
Assets Acquired:
Inventories	$	2,399
Property and equipment		11,474
Technology and customer relationships		623
Total assets		14,496
Less: gain on acquisition		2,021
Purchase price	$	12,475

Schedule of Finite-Lived Intangible Assets [Table Text Block]

Intangible assets, at cost, at June 30, 2012 and 2011 were as follows:

							Estimated Useful Life (Years)
	June 30, 2012			June 30, 2011			Minimum	Maximum
Patents and trademarks	$	6,934		$	6,774		5	17
Customer relationships and technology		2,163			2,163		3	7
Covenant not-to-compete		851			851				4
		9,948			9,788
Accumulated amortization		(4,750	)		(3,946	)
Total	$	5,198		$	5,842

Schedule of Purchase Price Allocation [Table Text Block]

The following is the final purchase price allocation based on the estimated fair values of the assets acquired and liabilities assumed as of the date of acquisition on January 22, 2010:

Cash	$	11
Inventories		403
Prepaid expenses		18
Property and equipment		15
Customer relationships		112
Technology		1,428
Goodwill		2,003
Total assets		3,990
Less: Liabilities assumed		89
Total	$	3,901

Business Acquisition, Pro Forma Information [Table Text Block]

The following unaudited proforma condensed financial information presents the results of operations for the years ended June 30, 2010

	Year ended June 30, 2010
Net revenues	$	101,330
Net loss attributable to Zygo Corporation	$	(3,565	)
Loss per share amounts:
Basic and Diluted - Loss per share	$	(0.21	)
Diluted - Loss per share	$	(0.21	)

Richmond, California [Member]

Schedule of Finite-Lived Intangible Assets [Table Text Block]

The following summarizes intangible asets for impairment annually

	Customer Relationships			Technology			Total
Balance at November 12, 2010	$	23		$	600		$	623
Accumulated amortization		(3	)		(76	)		(79	)
Balance at June 30, 2011	$	20		$	524		$	544

Zemetrics [Member]

Schedule of Finite-Lived Intangible Assets [Table Text Block]

The following disclosure presents certain information regarding the Company’s acquired intangible assets as of June 30, 2010.

	Customer Relationships			Technology			Total
Balance at January 22, 2010	$	112		$	1,428		$	1,540
Amortization expense		(16	)		(85	)		(101	)
Balance at June 30, 2010	$	96		$	1,343		$	1,439