CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		9 Months Ended
	Mar. 31, 2012	Mar. 31, 2011	Mar. 31, 2012	Mar. 31, 2011
Net revenues	$ 38,472	$ 40,235	$ 122,504	$ 107,440
Cost of goods sold	19,032	21,371	61,805	57,479
Gross profit	19,440	18,864	60,699	49,961
Selling, general and administrative expenses	8,702	9,418	26,272	24,886
Research, development and engineering expenses	4,017	3,739	12,166	10,872
Operating profit	6,721	5,707	22,261	14,203
Other income (expense)
Gain on acquisition				1,289
Miscellaneous income (expense), net	(23)	(153)	(221)	71
Total other income (expense)	(23)	(153)	(221)	1,360
Earnings from continuing operations before income taxes, including noncontrolling interests	6,698	5,554	22,040	15,563
Income tax expense	(772)	(720)	(2,381)	(1,474)
Net earnings from continuing operations	5,926	4,834	19,659	14,089
Net earnings from discontinued operations, net of tax				91
Net earnings including noncontrolling interests	5,926	4,834	19,659	14,180
Less: Net earnings attributable to noncontrolling interests	519	361	1,605	1,205
Net earnings attributable to Zygo Corporation	5,407	4,473	18,054	12,975
Basic - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.30	$ 0.25	$ 1.01	$ 0.73
Discontinued operations (in Dollars per share)				$ 0.01
Net earnings per share (in Dollars per share)	$ 0.30	$ 0.25	$ 1.01	$ 0.74
Diluted - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.29	$ 0.24	$ 0.97	$ 0.71
Discontinued operations (in Dollars per share)				$ 0.01
Net earnings per share (in Dollars per share)	$ 0.29	$ 0.24	$ 0.97	$ 0.72
Weighted average shares outstanding
Basic shares (in Shares)	18,116	17,693	17,948	17,600
Diluted shares (in Shares)	18,883	18,304	18,640	18,056
Amounts Attributable to Zygo Corporation
Net earnings from continuing operations attributable to Zygo Corporation	5,407	4,473	18,054	12,884
Discontinued operations, net of tax				91
Net earnings attributable to Zygo Corporation	$ 5,407	$ 4,473	$ 18,054	$ 12,975