CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		6 Months Ended
	Dec. 31, 2011	Dec. 31, 2010	Dec. 31, 2011	Dec. 31, 2010
Net revenues	$ 40,040	$ 36,086	$ 84,032	$ 67,205
Cost of goods sold	20,398	19,192	42,773	36,108
Gross profit	19,642	16,894	41,259	31,097
Selling, general and administrative expenses	8,107	8,257	17,570	15,468
Research, development and engineering expenses	4,087	3,768	8,149	7,133
Operating profit	7,448	4,869	15,540	8,496
Other income (expense)
Gain on acquisition		1,289		1,289
Miscellaneous income (expense), net	132	43	(198)	224
Total other income (expense)	132	1,332	(198)	1,513
Earnings from continuing operations before income taxes, including noncontrolling interests	7,580	6,201	15,342	10,009
Income tax expense	(823)	(111)	(1,609)	(754)
Net earnings from continuing operations	6,757	6,090	13,733	9,255
Net earnings from discontinued operations, net of tax				91
Net earnings including noncontrolling interests	6,757	6,090	13,733	9,346
Less: Net earnings attributable to noncontrolling interests	579	316	1,086	844
Net earnings attributable to Zygo Corporation	6,178	5,774	12,647	8,502
Basic - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.34	$ 0.33	$ 0.71	$ 0.47
Discontinued operations (in Dollars per share)				$ 0.01
Net earnings per share (in Dollars per share)	$ 0.34	$ 0.33	$ 0.71	$ 0.48
Diluted - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.33	$ 0.32	$ 0.68	$ 0.47
Discontinued operations (in Dollars per share)				$ 0.01
Net earnings per share (in Dollars per share)	$ 0.33	$ 0.32	$ 0.68	$ 0.48
Weighted average shares outstanding
Basic shares (in Shares)	17,930	17,596	17,865	17,554
Diluted shares (in Shares)	18,631	17,993	18,503	17,862
Amounts Attributable to Zygo Corporation
Net earnings from continuing operations attributable to Zygo Corporation	6,178	5,774	12,647	8,411
Discontinued operations, net of tax				91
Net earnings attributable to Zygo Corporation	$ 6,178	$ 5,774	$ 12,647	$ 8,502