CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Per Share data	3 Months Ended
	Sep. 30, 2011	Sep. 30, 2010
Net revenues	$ 43,992	$ 31,119
Cost of goods sold	22,375	16,916
Gross profit	21,617	14,203
Selling, general and administrative expenses	9,463	7,211
Research, development and engineering expenses	4,062	3,365
Operating profit	8,092	3,627
Other income (expense)
Interest income	7	3
Miscellaneous income (expense), net	(337)	178
Total other income (expense)	(330)	181
Earnings from continuing operations before income taxes, including noncontrolling interests	7,762	3,808
Income tax expense	(786)	(643)
Net earnings from continuing operations	6,976	3,165
Net earnings from discontinued operations, net of tax		91
Net earnings including noncontrolling interests	6,976	3,256
Less: Net earnings attributable to noncontrolling interests	507	528
Net earnings attributable to Zygo Corporation	6,469	2,728
Basic - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.36	$ 0.15
Discontinued operations (in Dollars per share)		$ 0.01
Net earnings per share (in Dollars per share)	$ 0.36	$ 0.16
Diluted - Earnings per share attributable to Zygo Corporation
Continuing operations (in Dollars per share)	$ 0.35	$ 0.15
Discontinued operations (in Dollars per share)		$ 0.01
Net earnings per share (in Dollars per share)	$ 0.35	$ 0.16
Weighted average shares outstanding
Basic shares (in Shares)	17,800	17,512
Diluted shares (in Shares)	18,353	17,772
Amounts Attributable to Zygo Corporation
Net earnings from continuing operations attributable to Zygo Corporation	6,469	2,637
Discontinued operations, net of tax		91
Net earnings attributable to Zygo Corporation	$ 6,469	$ 2,728