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Document and Entity Information
9 Months Ended
Dec. 29, 2012
Jan. 30, 2013
Document Information    
Document Type 10-Q  
Amendment Flag false  
Document Period End Date Dec. 29, 2012  
Document Fiscal Year Focus 2013  
Document Fiscal Period Focus Q3  
Trading Symbol ESIO  
Entity Registrant Name ELECTRO SCIENTIFIC INDUSTRIES INC  
Entity Central Index Key 0000726514  
Current Fiscal Year End Date --03-30  
Entity Filer Category Accelerated Filer  
Entity Common Stock, Shares Outstanding   29,502,808