EXHIBIT 21

ESI Subsidiaries

As of March 28, 2009

Name	State/Country of Incorporation	Percentage of Voting Securities Owned
Electro Scientific Industries GmbH	Germany	100	%
ESI International Corp.	Oregon	100	%
Electro Scientific Industries Japan Co., Ltd.	Japan	100	%
ESI Korea Co. Ltd.	Korea	100	%
Electro Scientific Industries Europe Ltd.	United Kingdom	100	%
Electro Scientific Industries, SARL	France	100	%
Electro Scientific Industries Singapore PTE Ltd.	Singapore	100	%
ESI China, Inc.	Oregon	100	%
ESI Electronic Equipment (Shanghai) Co., Ltd.	China	100	%
ESI (Beijing) R&D Center Co., Ltd.	China	100	%
ESI Technology Development, Pte. Ltd.	Singapore	100	%
ESI China R&D Investment, Pte. Ltd.	Singapore	100	%
ESI Taiwan (Branch Office)	Taiwan	100	%
ESI (Beijing) Electro Optic Manufacturing Co. Ltd.	China	100	%
New Wave Research, Inc	California	100	%
New Wave Research, Ltd (FSC)	Virgin Islands	100	%
New Wave Research, K.K	Japan	100	%
New Wave Research, Ltd.	Hong Kong	100	%
New Wave Research Co., Ltd. (WOFE).	China	100	%
New Wave Research Co., Ltd. (FICE)	China	100	%
New Wave Research G.C. Ltd.	Taiwan	100	%
Zirkon Merger Sub, LLC	Delaware	100	%