EXHIBIT 21

ESI Subsidiaries
As of May 31, 2003

Name	State/Country of Incorporation	Percentage of Voting Securities Owned
ESI F.S.C. (dormant)	Guam	100	%
Electro Scientific Industries GmbH	Germany	100	%
ESI International Corporation	Oregon	100	%
ESI Japan KK	Japan	100	%
ESI Korea Co. Ltd.	Korea	100	%
Electro Scientific Industries Ltd.	England	100	%
Electro Scientific Industries, BV (dormant)	The Netherlands	100	%
ESI SARL	France	100	%
ESI SRL (dormant)	Italy	100	%
Electro Scientific Industries Singapore PTE Ltd.	Singapore	100	%
ESI China, Inc.	Oregon	100	%
ESI Electronic Equipment (Shanghai) Co., Ltd.	China	100	%