EXHIBIT 21

ESI Subsidiaries
As of June 1, 2002

Name	State/Country of Incorporation	Percentage of Voting Securities Owned
ESI F.S.C.	Guam	100	%
Electro Scientific Industries GmbH	Germany	100	%
ESI International Corporation	Oregon	100	%
ESI Japan KK	Japan	100	%
ESI Korea Co. Ltd.	Korea	100	%
Electro Scientific Industries Ltd.	England	100	%
Electro Scientific Industries, BV	The Netherlands	100	%
ESI SARL	France	100	%
ESI SRL	Italy	100	%
Electro Scientific Industries Singapore PTE Ltd.	Singapore	100	%
ESIF, Inc.	Oregon	100	%