-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 V/DB9AsDoBdGdOIt0oRDXaHmvg3EA0dF8EH1SCtQbBktNnVHpjiwheaP4NJY0qdV
 X7TefJU8+JTTHTmv61NXpg==

<SEC-DOCUMENT>0001140361-10-022868.txt : 20100524
<SEC-HEADER>0001140361-10-022868.hdr.sgml : 20100524
<ACCEPTANCE-DATETIME>20100524172745
ACCESSION NUMBER:		0001140361-10-022868
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20100513
FILED AS OF DATE:		20100524
DATE AS OF CHANGE:		20100524

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0329

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Nierenberg Investment Management Company, Inc.
		CENTRAL INDEX KEY:			0001282683
		STATE OF INCORPORATION:			WA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854936

	BUSINESS ADDRESS:	
		STREET 1:		19605 NE 8TH ST
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH ST
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	NIERENBERG INVESTMENT MANAGEMENT CO
		DATE OF NAME CHANGE:	20040304

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			DIII Offshore Fund, LP
		CENTRAL INDEX KEY:			0001282684

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854931

	BUSINESS ADDRESS:	
		STREET 1:		19605 NE 8TH ST
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH ST
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	DIII OFFSHORE FUND LP
		DATE OF NAME CHANGE:	20070108

	FORMER NAME:	
		FORMER CONFORMED NAME:	D3 OFFSHORE FUND LP
		DATE OF NAME CHANGE:	20040304

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			D3 Family Fund, LP
		CENTRAL INDEX KEY:			0001282685
		STATE OF INCORPORATION:			WA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854934

	BUSINESS ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	D3 FAMILY FUND LP
		DATE OF NAME CHANGE:	20040304

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			D3 Family Bulldog Fund, LP
		CENTRAL INDEX KEY:			0001365745

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854933

	BUSINESS ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	D3 Family Bulldog Fund LP
		DATE OF NAME CHANGE:	20060612

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Nierenberg Investment Management Offshore Inc.
		CENTRAL INDEX KEY:			0001365764
		STATE OF INCORPORATION:			C5
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854935

	BUSINESS ADDRESS:	
		STREET 1:		TRADEWINDS BUILDING, 4TH FLOOR
		STREET 2:		BAY STREET
		CITY:			NASSAU
		STATE:			C5
		ZIP:			00000
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	Nierenberg Investment Management Offshore Inc
		DATE OF NAME CHANGE:	20060612

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			D3 Family Canadian Fund, LP
		CENTRAL INDEX KEY:			0001405824
		STATE OF INCORPORATION:			WA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		10854932

	BUSINESS ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607
		BUSINESS PHONE:		360-604-8600

	MAIL ADDRESS:	
		STREET 1:		19605 NE 8TH STREET
		CITY:			CAMAS
		STATE:			WA
		ZIP:			98607

	FORMER NAME:	
		FORMER CONFORMED NAME:	D3 Family Canadian Fund, L.P.
		DATE OF NAME CHANGE:	20070706
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>doc1.xml
<DESCRIPTION>FORM 4
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0303</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2010-05-13</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001282683</rptOwnerCik>
            <rptOwnerName>Nierenberg Investment Management Company, Inc.</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001365764</rptOwnerCik>
            <rptOwnerName>Nierenberg Investment Management Offshore Inc.</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001282685</rptOwnerCik>
            <rptOwnerName>D3 Family Fund, LP</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001365745</rptOwnerCik>
            <rptOwnerName>D3 Family Bulldog Fund, LP</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001405824</rptOwnerCik>
            <rptOwnerName>D3 Family Canadian Fund, LP</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001282684</rptOwnerCik>
            <rptOwnerName>DIII Offshore Fund, LP</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>19605 NE 8TH STREET</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CAMAS</rptOwnerCity>
            <rptOwnerState>WA</rptOwnerState>
            <rptOwnerZipCode>98607</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2010-05-13</value>
            </transactionDate>
            <deemedExecutionDate></deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>840</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>572239</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By The D3 Family Fund, LP</value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2010-05-13</value>
            </transactionDate>
            <deemedExecutionDate></deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>3470</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>2425796</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By The D3 Family Bulldog Fund, LP</value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2010-05-13</value>
            </transactionDate>
            <deemedExecutionDate></deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>380</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>233715</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By The D3 Family Canadian Fund, LP</value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2010-05-13</value>
            </transactionDate>
            <deemedExecutionDate></deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>810</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>592734</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By The DIII Offshore Fund, LP</value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <derivativeTable></derivativeTable>

    <footnotes>
        <footnote id="F1">Mr. Nierenberg has been granted 5,500 restricted stock units which are immediately vested in connection with his service on the Board of Directors of the Issuer on May 13, 2010.</footnote>
        <footnote id="F2">Each of the reporting persons disclaims beneficial ownership of these securities except to the extent of the reporting person's pecuniary interest therein.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>David Nierenberg</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, Nierenberg Investment Management Company, Inc. (NIMCO)</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, Nierenberg Investment Management Offshore, Inc. (NIMO)</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, NIMCO, General Partner of The D3 Family Fund, LP</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, NIMCO, General Partner of The D3 Family Bulldog Fund, LP</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, NIMCO, General Partner of The D3 Family Canadian Fund, LP</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>David Nierenberg, President, NIMO, General Partner of The DIII Offshore Fund, LP</signatureName>
        <signatureDate>2010-05-24</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----