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Exhibit 12.1

ELECTRO SCIENTIFIC INDUSTRIES
COMPUTATION OF RATIO OF EARNINGS TO FIXED CHARGES
(AMOUNTS IN THOUSANDS OF DOLLARS)

			Fiscal Year Ended June 2,
								Nine Months Ended March 2, 2002
			1997	1998	1999	2000	2001
Pre-tax income			27,987	32,316	10,980	59,872	149,930	(18,425	)
Fixed charges:
		Interest expense	3	32	158	223	4	1,648
		Interest portion of rentals(1)	305	530	572	451	577	638
	Total fixed charges		308	562	730	674	581	2,286
Earnings plus fixed charges			28,295	32,878	11,710	60,546	150,510	(16,139	)
Ratio of earnings to fixed charges			92	59	16	90	260	(7	)

(1)

Calculated as one-third of rentals, which is a reasonable approximation of the interest factor.

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ELECTRO SCIENTIFIC INDUSTRIES COMPUTATION OF RATIO OF EARNINGS TO FIXED CHARGES (AMOUNTS IN THOUSANDS OF DOLLARS)