<SEC-DOCUMENT>0000726514-15-000068-index.html : 20150710
<SEC-HEADER>0000726514-15-000068.hdr.sgml : 20150710
<ACCEPTANCE-DATETIME>20150710143418
ACCESSION NUMBER:		0000726514-15-000068
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		8
CONFORMED PERIOD OF REPORT:	20150710
FILED AS OF DATE:		20150710
DATE AS OF CHANGE:		20150710
EFFECTIVENESS DATE:		20150710

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0328

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		15983454

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>fy15proxy.htm
<DESCRIPTION>DEF 14A PROXY STATEMENT
<TEXT>
Document 1 - file: fy15proxy.htm

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>ceopie.jpg
<TEXT>
Document 2 - file: ceopie.jpg

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<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>ceostacked.jpg
<TEXT>
Document 3 - file: ceostacked.jpg

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<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>esilogonewhoriz.jpg
<TEXT>
Document 4 - file: esilogonewhoriz.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>proldhamsignaturea01a01.jpg
<TEXT>
Document 5 - file: proldhamsignaturea01a01.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>proldhamsignaturea02.jpg
<TEXT>
Document 6 - file: proldhamsignaturea02.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>proxycardback.jpg
<TEXT>
Document 7 - file: proxycardback.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>proxycardfront.jpg
<TEXT>
Document 8 - file: proxycardfront.jpg

</DOCUMENT>
</SEC-DOCUMENT>