<SEC-DOCUMENT>0000726514-14-000092-index.html : 20141006
<SEC-HEADER>0000726514-14-000092.hdr.sgml : 20141006
<ACCEPTANCE-DATETIME>20141003173803
ACCESSION NUMBER:		0000726514-14-000092
CONFORMED SUBMISSION TYPE:	S-8 POS
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20141006
DATE AS OF CHANGE:		20141003
EFFECTIVENESS DATE:		20141006

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0329

	FILING VALUES:
		FORM TYPE:		S-8 POS
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-88411
		FILM NUMBER:		141141102

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8 POS
<SEQUENCE>1
<FILENAME>s-8amendment1989plan.htm
<DESCRIPTION>S-8 POS
<TEXT>
Document 1 - file: s-8amendment1989plan.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.2
<SEQUENCE>2
<FILENAME>exhibit52.htm
<DESCRIPTION>EXHIBIT
<TEXT>
Document 2 - file: exhibit52.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24.1
<SEQUENCE>3
<FILENAME>exhibit241.htm
<DESCRIPTION>EXHIBIT 24.1
<TEXT>
Document 3 - file: exhibit241.htm

</DOCUMENT>
</SEC-DOCUMENT>