POWER OF ATTORNEY (Section 16(a) Reporting)

KNOW ALL MEN BY THESE PRESENTS, that the undersigned, an officer,
directorand/or shareholder of Electro Scientific Industries, Inc.
(the "Company"),  does hereby constitute and appoint Edward Grady,
Paul Oldham and Kerry Mustoe, and any one of them, his true and
lawful attorney and agent to execute in his name any and all reports
required to be filed under Section 16(a) of the Securities Exchange
Act of 1934 with respect to equity securities of the Company; and to
file the same with the Securities and Exchange Commission and any
applicable stock exchange; and the undersigned does hereby ratify
and confirm all that said attorneys and agents, or any of them,
shall do or cause to be done by virtue hereof.

This Power of Attorney revokes all prior Powers of Attorney relating
to reporting underSection 16(a) with respect to equity securities
of the Company and shall remain in effect until revoked by a subsequently
filed instrument.


Date:  August 25, 2014				/s/ Richard H. Wills
								Richard H. Wills