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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 JAk+VUxDYeuQQfyzhb926IHF8+nY2pEQIxhh8FlwbxKmPSwUGxCRa9bKtIEbdKID
 ySzLKRAQBwE+EOdrhGQz4w==

<SEC-DOCUMENT>0000726514-08-000003.txt : 20080107
<SEC-HEADER>0000726514-08-000003.hdr.sgml : 20080107
<ACCEPTANCE-DATETIME>20080107181950
ACCESSION NUMBER:		0000726514-08-000003
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20080107
FILED AS OF DATE:		20080107
DATE AS OF CHANGE:		20080107

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0531

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Oldham Paul R
		CENTRAL INDEX KEY:			0001421764

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		08516226

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		503-641-4141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2008-01-07</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001421764</rptOwnerCik>
            <rptOwnerName>Oldham Paul R</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>13900 NW SCIENCE PARK DR.</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PORTLAND</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97229</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>CFO</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <ownerSignature>
        <signatureName>Paul R Oldham</signatureName>
        <signatureDate>2008-01-07</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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