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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
 FMxyS2vca82vATT6ay1QcJMHkX5FTJGYITmEEk7eSD0HDLykuDzK9AuchJ8kgEVb
 cZq94Roj+m4GMLgOeBWfPQ==

<SEC-DOCUMENT>0000726514-06-000016.txt : 20060530
<SEC-HEADER>0000726514-06-000016.hdr.sgml : 20060529
<ACCEPTANCE-DATETIME>20060530170824
ACCESSION NUMBER:		0000726514-06-000016
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20060526
FILED AS OF DATE:		20060530
DATE AS OF CHANGE:		20060530

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0531

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			HARMON BARRY L
		CENTRAL INDEX KEY:			0001194665

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		06874718

	MAIL ADDRESS:	
		STREET 1:		4991 CORPORATE DRIVE
		CITY:			HUNTVILLE
		STATE:			AL
		ZIP:			35805
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2006-05-26</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001194665</rptOwnerCik>
            <rptOwnerName>HARMON BARRY L</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>13900 NW SCIENCE PARK DR.</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PORTLAND</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97229</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>19.92</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2006-05-26</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>5000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F2"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <value>2016-05-25</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>5000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>5000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Option vests 100% at grant.  The shares underlying the option are restricted from sale for three years.</footnote>
        <footnote id="F2">No purchase price is paid upon grant of option.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Kerry L. Mustoe  For: Barry L. Harmon</signatureName>
        <signatureDate>2006-05-30</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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