Inventories, Net (Tables)

9 Months Ended

Sep. 30, 2021

Inventory Disclosure [Abstract]

Schedule of Inventories, Net

	December 31,		September 30,
	2020		2021
	(In thousands)
Raw materials	$	3,220	$	4,996
Work in process		11,668		15,048
Finished products		3,449		3,492
Total	$	18,337	$	23,536