<SEC-DOCUMENT>0001564590-22-011838-index.html : 20220325
<SEC-HEADER>0001564590-22-011838.hdr.sgml : 20220325
<ACCEPTANCE-DATETIME>20220325172355
ACCESSION NUMBER:		0001564590-22-011838
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		8
FILED AS OF DATE:		20220325
DATE AS OF CHANGE:		20220325
EFFECTIVENESS DATE:		20220325

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-263875
		FILM NUMBER:		22772485

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>asys-s8.htm
<DESCRIPTION>S-8
<TEXT>
Document 1 - file: asys-s8.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>asys-ex51_129.htm
<DESCRIPTION>EX-5.1
<TEXT>
Document 2 - file: asys-ex51_129.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>3
<FILENAME>asys-ex231_378.htm
<DESCRIPTION>EX-23.1
<TEXT>
Document 3 - file: asys-ex231_378.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>4
<FILENAME>asys-ex991_111.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 4 - file: asys-ex991_111.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-FILING FEES
<SEQUENCE>5
<FILENAME>asys-exfilingfees_112.htm
<DESCRIPTION>EX-FILING FEES
<TEXT>
Document 5 - file: asys-exfilingfees_112.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>gylyxqqeedbb000003.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: gylyxqqeedbb000003.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>gylyxqqeedbb000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: gylyxqqeedbb000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>gylyxqqeedbb000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: gylyxqqeedbb000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>