POWER OF ATTORNEY



Know all by these presents, that the undersigned hereby constitutes and
appoints Robert T. Hass and Bradley C. Anderson or either of them acting
in the absence of the other, with full power of substitution, the
undersigned's true and lawful attorney-in-fact, with full power and
authority as  hereinafter described on behalf of and in the name, place
and stead of the undersigned to:



     1.  execute for and on behalf of the undersigned, in the
undersigned's capacity as an officer and/or director of Amtech Systems,
Inc., an Arizona corporation (the "Company"),  Forms ID, 3, 4, and 5 in
accordance with Section 16(a) of the Securities Exchange Act of 1934
and the rules thereunder;



     2.  do and perform any and all acts for and on behalf of the
undersigned that may be  necessary or desirable to complete and execute
any such Form ID, 3, 4, or 5, complete and  execute any amendment or
amendments thereto, and timely file such form with the United States
Securities and Exchange Commission and any stock exchange or similar
authority; and



     3.  take any other action of any type whatsoever in connection with
the foregoing which,  in the opinion of such attorney-in-fact, may be of
benefit to, in the best interest of, or legally  required by, the
undersigned, it being understood that the documents executed by such
 attorney-in-fact on behalf of the undersigned pursuant to this Power of
Attorney shall be in such  form and shall contain such terms and
conditions as such attorney-in-fact may approve in such
attorney-in-fact's discretion.



The undersigned hereby grants to attorney-in-fact full power and
authority to do and  perform any and every act and thing whatsoever
requisite, necessary, or proper to be done in  the exercise of any of
the rights and powers herein granted, as fully to all intents and
purposes as  the undersigned might or could do if personally present,
with full power of substitution or  revocation, hereby ratifying and
confirming all that such attorney-in-fact, or such attorney-in- fact's
substitute or substitutes, shall lawfully do or cause to be done by
virtue of this power of  attorney and the rights and powers herein
granted. The undersigned acknowledges that the  foregoing
attorney-in-fact, in serving in such capacity at the request of the
undersigned, is not  assuming, nor is the Company assuming, any of the
undersigned's responsibilities to comply with  Section 16 of the
Securities Exchange Act of 1934.




This Power of Attorney shall remain in full force and effect until the
undersigned is no  longer required to file Forms ID, 3, 4, and 5 with
respect to the undersigned's holdings of and  transactions in securities
issued by the Company, unless earlier revoked by the undersigned in a
signed writing delivered to the foregoing attorney-in-fact.



IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to
be executed as of this 25th day of June 2009.



Signature:





/s/ Jeong Mo Hwang
____________________
Jeong Mo Hwang



STATE OF ARIZONA            )

                                                )  SS.

COUNTY OF MARICOPA     )



On June 25, 2009, before me, Mary V. Jensen, a Notary Public,
personally  appeared Jeong Mo Hwang, personally known to me (or proved
to me on the basis of satisfactory  evidence) to be the person whose
name is subscribed to the within instrument and acknowledged  to me that
he/she executed the same in his/her authorized capacity, and that by
his/her signature  on the instrument the person, or the entity upon
behalf of which the person acted, executed the  instrument.



WITNESS my hand and official seal.







/s/ Mary V. Jensen
___________________

Notary Public



MARY V. JENSEN

Notary Public in Arizona

Maricopa County

My Commission Expires

August 28, 2010










NOTARY SEAL