POWER OF ATTORNEY

Know all by these presents, that the undersigned hereby constitutes and
appoints Robert  T. Hass, the undersigned's true and lawful attorney-in-
fact, with full power and authority as  hereinafter described on behalf of
and in the name, place and stead of the undersigned to:

     1.  execute for and on behalf of the undersigned, in the undersigned's
capacity as an  officer and/or director of Amtech Systems, Inc., an Arizona
corporation (the "Company"),  Forms 3, 4, and 5 in accordance with Section
16(a) of the Securities Exchange Act of 1934  and the rules thereunder;

     2.  do and perform any and all acts for and on behalf of the
undersigned that may be  necessary or desirable to complete and execute any
such Form 3, 4, or 5, complete and  execute any amendment or amendments
thereto, and timely file such form with the United States  Securities and
Exchange Commission and any stock exchange or similar authority; and

     3.  take any other action of any type whatsoever in connection with
the foregoing which,  in the opinion of such attorney-in-fact, may be of
benefit to, in the best interest of, or legally  required by, the
undersigned, it being understood that the documents executed by such
attorney-in-fact on behalf of the undersigned pursuant to this Power of
Attorney shall be in such  form and shall contain such terms and conditions
as such attorney-in-fact may approve in such  attorney-in-fact's
discretion.

The undersigned hereby grants to attorney-in-fact full power and authority
to do and  perform any and every act and thing whatsoever requisite,
necessary, or proper to be done in  the exercise of any of the rights and
powers herein granted, as fully to all intents and purposes as  the
undersigned might or could do if personally present, with full power of
substitution or  revocation, hereby ratifying and confirming all that such
attorney-in-fact, or such attorney-in- fact's substitute or substitutes,
shall lawfully do or cause to be done by virtue of this power of  attorney
and the rights and powers herein granted. The undersigned acknowledges that
the  foregoing attorney-in-fact, in serving in such capacity at the request
of the undersigned, is not  assuming, nor is the Company assuming, any of
the undersigned's responsibilities to comply with  Section 16 of the
Securities Exchange Act of 1934.

This Power of Attorney shall remain in full force and effect until the
undersigned is no  longer required to file Forms 3, 4, and 5 with respect
to the undersigned's holdings of and  transactions in securities issued by
the Company, unless earlier revoked by the undersigned in a  signed writing
delivered to the foregoing attorney-in-fact.

IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be
executed as of this 3rd day of November, 2005.

Signature: /s/ Robert F. King


STATE OF ARIZONA        )
                        )  SS.
COUNTY OF MARICOPA      )

On November 3, 2005, before me, /s/ Barbara Matthews, a Notary Public,
personally  appeared Robert F. King, personally known to me (or proved to
me on the basis of satisfactory  evidence) to be the person whose name is
subscribed to the within instrument and acknowledged  to me that he/she
executed the same in his/her authorized capacity, and that by his/her
signature  on the instrument the person, or the entity upon behalf of which
the person acted, executed the  instrument.

WITNESS my hand and official seal.
/s/ Barbara Matthews
Notary Public

NOTORARY SEAL