EX-23.3 8 exhibit_23-3.htm CONSENT OF INDEPENDENT REGISTERED

Exhibit 23.3

CONSENT OF INDEPENDENT REGISTERED
PUBLIC ACCOUNTING FIRM

The Board of Directors of
Amtech Systems, Inc.:

We consent to the use of our report incorporated by reference herein and to the reference to our firm under the heading “Experts” in the prospectus.

 

/s/ KPMG LLP

 

Phoenix, Arizona

 

January 16, 2007