Exhibit 21

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT

Name	Jurisdiction in which incorporated
Tempress Systems, Inc.	State of Texas
Tempress Holdings B.V.	The Netherlands
Tempress Systems B.V.	The Netherlands
Tempress Manufacturing B.V.	The Netherlands
Tempress Engineering B.V.	The Netherlands
P.R. Hoffman Machine Products, Inc.	State of Arizona
Bruce Technologies, Inc.	State of Massachusetts
Bruce Technologies Europe GmbH	Federal Republic of Germany