<SEC-DOCUMENT>0001104659-22-061940-index.html : 20220517
<SEC-HEADER>0001104659-22-061940.hdr.sgml : 20220517
<ACCEPTANCE-DATETIME>20220517160840
ACCESSION NUMBER:		0001104659-22-061940
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20220513
FILED AS OF DATE:		20220517
DATE AS OF CHANGE:		20220517

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Averick Robert M
		CENTRAL INDEX KEY:			0001343599

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		22934516

	MAIL ADDRESS:	
		STREET 1:		KOKINO LLC
		STREET 2:		201 TRESSER BOULEVARD, 3RD FLOOR
		CITY:			STAMFORD
		STATE:			CT
		ZIP:			06901

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
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<TYPE>4
<SEQUENCE>1
<FILENAME>tm2215835-1_4seq1.xml
<DESCRIPTION>OWNERSHIP DOCUMENT
<TEXT>
Document 1 - file: tm2215835-1_4seq1.html

Document 1 - RAW XML: tm2215835-1_4seq1.xml

</DOCUMENT>
</SEC-DOCUMENT>