EX-21.1 5 asys-ex21_1.htm EX-21.1 EX-21.1

 

Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

 

Name

 

Jurisdiction in which incorporated

Advanced Compound Materials, Inc.

 

State of Delaware

 

 

 

Bruce Technologies, Inc.

 

State of Massachusetts

 

 

 

BTU Europe Ltd.

 

United Kingdom

 

 

 

BTU International, Inc.

 

State of Delaware

 

 

 

BTU Ltd. (Shanghai)

 

China

 

 

 

BTU Overseas, Ltd.

 

State of Delaware

 

 

 

BTU Overseas (Shanghai) Co., Ltd.

 

China

 

 

 

Entrepix, Inc.

 

State of Arizona

 

 

 

Entrepix Asia Ptd., Ltd.

 

Singapore

 

 

 

Entrepix International, Inc.

 

State of Arizona

 

 

 

Intersurface Dynamics, Inc.

 

State of Connecticut

 

 

 

P.R. Hoffman Machine Products, Inc.

 

State of Arizona