0000950170-24-028631.txt : 20240308 0000950170-24-028631.hdr.sgml : 20240308 20240308160707 ACCESSION NUMBER: 0000950170-24-028631 CONFORMED SUBMISSION TYPE: 8-K PUBLIC DOCUMENT COUNT: 12 CONFORMED PERIOD OF REPORT: 20240306 ITEM INFORMATION: Submission of Matters to a Vote of Security Holders ITEM INFORMATION: Financial Statements and Exhibits FILED AS OF DATE: 20240308 DATE AS OF CHANGE: 20240308 FILER: COMPANY DATA: COMPANY CONFORMED NAME: AMTECH SYSTEMS INC CENTRAL INDEX KEY: 0000720500 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 860411215 STATE OF INCORPORATION: AZ FISCAL YEAR END: 0930 FILING VALUES: FORM TYPE: 8-K SEC ACT: 1934 Act SEC FILE NUMBER: 000-11412 FILM NUMBER: 24734352 BUSINESS ADDRESS: STREET 1: 58 S RIVER DRIVE SUITE 370 CITY: TEMPE STATE: AZ ZIP: 85288 BUSINESS PHONE: 4809675146 MAIL ADDRESS: STREET 1: 58 S RIVER DRIVE SUITE 370 CITY: TEMPE STATE: AZ ZIP: 85288 FORMER COMPANY: FORMER CONFORMED NAME: QUARTZ ENGINEERING & MATERIALS INC DATE OF NAME CHANGE: 19870715 8-K 1 asys-20240306.htm 8-K 8-K
0000720500falseAMTECH SYSTEMS INC00007205002024-03-062024-03-06

 

UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549

 

FORM 8-K

 

CURRENT REPORT

Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

Date of Report (Date of earliest event reported): March 06, 2024

 

 

Amtech Systems, Inc.

(Exact name of Registrant as Specified in Its Charter)

 

 

Arizona

000-11412

86-0411215

(State or Other Jurisdiction
of Incorporation)

(Commission File Number)

(IRS Employer
Identification No.)

 

 

 

 

 

131 S. Clark Drive

 

Tempe, Arizona

 

85288

(Address of Principal Executive Offices)

 

(Zip Code)

 

Registrant’s Telephone Number, Including Area Code: (480) 967-5146

 

Not Applicable

(Former Name or Former Address, if Changed Since Last Report)

 

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:

Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))
Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

Securities registered pursuant to Section 12(b) of the Act:


Title of each class

 

Trading
Symbol(s)

 


Name of each exchange on which registered

Common Stock, par value $0.01 per share

 

ASYS

 

Nasdaq Global Select Market

Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (§ 230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§ 240.12b-2 of this chapter).

Emerging growth company

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.

 


Item 5.07 Submission of Matters to a Vote of Security Holders.

 

On March 6, 2024, Amtech Systems, Inc. (the “Registrant” or the “Company”) held its 2024 Annual Meeting of Shareholders (the “Annual Meeting”). At the Annual Meeting, the Company’s shareholders considered four proposals, each of which are described in detail in the Company’s definitive proxy statement dated January 19, 2024. As of January 12, 2024, there were 14,190,977 shares of the Company’s common stock issued, outstanding and eligible to vote on the proposals presented at the Annual Meeting. The total number of shares represented in person or by proxy at the Annual Meeting was 10,654,298 or 75.07% of the shares eligible to vote. The voting results for each of the proposals are set forth below.

 

Proposal 1 – Election of directors

 

The individuals listed below received the highest number of affirmative votes of the outstanding shares of the Company’s common stock present or represented by proxy and voting at the Annual Meeting and were elected at the Annual Meeting to serve a one-year term on the Company’s board of directors.

 

 

 

For

 

Withheld

 

Broker Non-Votes

Robert C. Daigle

 

8,369,694

 

196,768

 

2,087,836

Lisa D. Gibbs

 

8,055,541

 

510,921

 

2,087,836

Robert M. Averick

 

8,174,526

 

391,936

 

2,087,836

Michael Garnreiter

 

8,270,870

 

295,592

 

2,087,836

Michael M. Ludwig

 

8,149,039

 

417,423

 

2,087,836

 

Proposal 2 – To approve the ratification of the independent registered public accountants

 

The shareholders ratified the appointment of Grant Thornton LLP as the Company’s independent registered public accounting firm for fiscal year 2024.

 

For

 

Against

 

Abstain

 

Broker Non-Votes

10,519,743

 

48,463

 

86,092

 

N/A

 

Please see the Company’s Current Report on Form 8-K filed with the Securities Exchange Commission on March 5, 2024 reporting a

change in independent registered public accounting firm.

 

Proposal 3 – Advisory vote on named executive officer compensation

 

The shareholders approved, on an advisory basis, the compensation of the named executive officers.

 

For

 

Against

 

Abstain

 

Broker Non-Votes

4,837,445

 

3,183,479

 

545,538

 

2,087,836

 

Proposal 4 – Frequency of Future Advisory vote on named executive officers compensation

 

1 Year

 

2 Years

 

3 years

 

Abstain

 

Broker Non-Votes

6,775,891

 

48,003

 

1,207,567

 

535,001

 

2,087,836

 

No other proposals were submitted to a vote of the Company’s shareholders at the Annual Meeting.

 

Item 9.01 Financial Statements and Exhibits.

 

d) Exhibits.

Exhibit No.

Description

   104

Cover Page Interactive Data File (embedded within the Inline XBRL document)

 

 


SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.

 

 

 

AMTECH SYSTEMS, INC.

 

 

 

 

Date:

March 8, 2024

By:

/s/ Lisa D. Gibbs

 

 

 

Name: Lisa D. Gibbs

Title: Vice President and Chief Financial Officer

 


EX-101.SCH 2 asys-20240306.xsd XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT 100000 - Document - Document And Entity Information link:presentationLink link:calculationLink link:definitionLink Cover [Abstract] Amendment Flag City Area Code Document Period End Date Document Type Entity Address, Address Line One Entity Address, City or Town Entity Address, Postal Zip Code Entity Address, State or Province Entity Central Index Key Entity Emerging Growth Company Entity File Number Entity Incorporation, State or Country Code Entity Information, Former Legal or Registered Name Entity Registrant Name Entity Tax Identification Number Local Phone Number Pre-commencement Issuer Tender Offer Pre-commencement Tender Offer Title of 12(b) Security Security Exchange Name Soliciting Material Trading Symbol Written Communications XML 3 R1.htm IDEA: XBRL DOCUMENT v3.24.0.1
Document And Entity Information
Mar. 06, 2024
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date Mar. 06, 2024
Entity Registrant Name AMTECH SYSTEMS INC
Entity Central Index Key 0000720500
Entity Emerging Growth Company false
Entity File Number 000-11412
Entity Incorporation, State or Country Code AZ
Entity Tax Identification Number 86-0411215
Entity Address, Address Line One 131 S. Clark Drive
Entity Address, City or Town Tempe
Entity Address, State or Province AZ
Entity Address, Postal Zip Code 85288
City Area Code (480)
Local Phone Number 967-5146
Entity Information, Former Legal or Registered Name Not Applicable
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, par value $0.01 per share
Trading Symbol ASYS
Security Exchange Name NASDAQ
EXCEL 5 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx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end XML 6 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 7 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 9 FilingSummary.xml IDEA: XBRL DOCUMENT 3.24.0.1 html 1 23 1 false 0 0 false 0 false false R1.htm 100000 - Document - Document And Entity Information Sheet http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation Document And Entity Information Cover 1 false false All Reports Book All Reports asys-20240306.htm asys-20240306.xsd http://xbrl.sec.gov/dei/2023 false false JSON 12 MetaLinks.json IDEA: XBRL DOCUMENT { "version": "2.2", "instance": { "asys-20240306.htm": { "nsprefix": "asys", "nsuri": "http://amtechsystems.com/20240306", "dts": { "inline": { "local": [ "asys-20240306.htm" ] }, "schema": { "local": [ "asys-20240306.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd", "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd", "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd", "https://xbrl.sec.gov/country/2023/country-2023.xsd", "https://xbrl.sec.gov/dei/2023/dei-2023.xsd" ] } }, "keyStandard": 23, "keyCustom": 0, "axisStandard": 0, "axisCustom": 0, "memberStandard": 0, "memberCustom": 0, "hidden": { "total": 3, "http://xbrl.sec.gov/dei/2023": 3 }, "contextCount": 1, "entityCount": 1, "segmentCount": 0, "elementCount": 24, "unitCount": 0, "baseTaxonomies": { "http://xbrl.sec.gov/dei/2023": 23 }, "report": { "R1": { "role": "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation", "longName": "100000 - Document - Document And Entity Information", "shortName": "Document And Entity Information", "isDefault": "true", "groupType": "document", "subGroupType": "", "menuCat": "Cover", "order": "1", "firstAnchor": { "contextRef": "C_2f5aa317-cdd1-4408-b75c-688a4a709ae5", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "p", "body", "html" ], "reportCount": 1, "baseRef": "asys-20240306.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "C_2f5aa317-cdd1-4408-b75c-688a4a709ae5", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "p", "body", "html" ], "reportCount": 1, "baseRef": "asys-20240306.htm", "first": true, "unique": true } } }, "tag": { "dei_AmendmentFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AmendmentFlag", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Amendment Flag", "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission." } } }, "auth_ref": [] }, "dei_CityAreaCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CityAreaCode", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "City Area Code", "documentation": "Area code of city" } } }, "auth_ref": [] }, "dei_CoverAbstract": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CoverAbstract", "lang": { "en-us": { "role": { "label": "Cover [Abstract]", "documentation": "Cover page." } } }, "auth_ref": [] }, "dei_DocumentPeriodEndDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentPeriodEndDate", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Period End Date", "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD." } } }, "auth_ref": [] }, "dei_DocumentType": { "xbrltype": "submissionTypeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentType", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Type", "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'." } } }, "auth_ref": [] }, "dei_EntityAddressAddressLine1": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine1", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line One", "documentation": "Address Line 1 such as Attn, Building Name, Street Name" } } }, "auth_ref": [] }, "dei_EntityAddressCityOrTown": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressCityOrTown", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, City or Town", "documentation": "Name of the City or Town" } } }, "auth_ref": [] }, "dei_EntityAddressPostalZipCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressPostalZipCode", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Postal Zip Code", "documentation": "Code for the postal or zip code" } } }, "auth_ref": [] }, "dei_EntityAddressStateOrProvince": { "xbrltype": "stateOrProvinceItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressStateOrProvince", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, State or Province", "documentation": "Name of the state or province." } } }, "auth_ref": [] }, "dei_EntityCentralIndexKey": { "xbrltype": "centralIndexKeyItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCentralIndexKey", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Central Index Key", "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK." } } }, "auth_ref": [ "r1" ] }, "dei_EntityEmergingGrowthCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityEmergingGrowthCompany", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Emerging Growth Company", "documentation": "Indicate if registrant meets the emerging growth company criteria." } } }, "auth_ref": [ "r1" ] }, "dei_EntityFileNumber": { "xbrltype": "fileNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFileNumber", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity File Number", "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen." } } }, "auth_ref": [] }, "dei_EntityIncorporationStateCountryCode": { "xbrltype": "edgarStateCountryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityIncorporationStateCountryCode", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Incorporation, State or Country Code", "documentation": "Two-character EDGAR code representing the state or country of incorporation." } } }, "auth_ref": [] }, "dei_EntityInformationFormerLegalOrRegisteredName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityInformationFormerLegalOrRegisteredName", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Information, Former Legal or Registered Name", "documentation": "Former Legal or Registered Name of an entity" } } }, "auth_ref": [] }, "dei_EntityRegistrantName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityRegistrantName", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Registrant Name", "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC." } } }, "auth_ref": [ "r1" ] }, "dei_EntityTaxIdentificationNumber": { "xbrltype": "employerIdItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityTaxIdentificationNumber", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Tax Identification Number", "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS." } } }, "auth_ref": [ "r1" ] }, "dei_LocalPhoneNumber": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "LocalPhoneNumber", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Local Phone Number", "documentation": "Local phone number for entity." } } }, "auth_ref": [] }, "dei_PreCommencementIssuerTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementIssuerTenderOffer", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Issuer Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act." } } }, "auth_ref": [ "r3" ] }, "dei_PreCommencementTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementTenderOffer", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act." } } }, "auth_ref": [ "r4" ] }, "dei_Security12bTitle": { "xbrltype": "securityTitleItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Security12bTitle", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Title of 12(b) Security", "documentation": "Title of a 12(b) registered security." } } }, "auth_ref": [ "r0" ] }, "dei_SecurityExchangeName": { "xbrltype": "edgarExchangeCodeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SecurityExchangeName", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Security Exchange Name", "documentation": "Name of the Exchange on which a security is registered." } } }, "auth_ref": [ "r2" ] }, "dei_SolicitingMaterial": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SolicitingMaterial", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Soliciting Material", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act." } } }, "auth_ref": [ "r5" ] }, "dei_TradingSymbol": { "xbrltype": "tradingSymbolItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "TradingSymbol", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Trading Symbol", "documentation": "Trading symbol of an instrument as listed on an exchange." } } }, "auth_ref": [] }, "dei_WrittenCommunications": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "WrittenCommunications", "presentation": [ "http://amtechsystems.com/20240306/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Written Communications", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act." } } }, "auth_ref": [ "r6" ] } } } }, "std_ref": { "r0": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b" }, "r1": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b-2" }, "r2": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "d1-1" }, "r3": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "13e", "Subsection": "4c" }, "r4": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "14d", "Subsection": "2b" }, "r5": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Section": "14a", "Number": "240", "Subsection": "12" }, "r6": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Securities Act", "Number": "230", "Section": "425" } } } ZIP 13 0000950170-24-028631-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0000950170-24-028631-xbrl.zip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�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asys-20240306_htm.xml IDEA: XBRL DOCUMENT 0000720500 2024-03-06 2024-03-06 0000720500 false AMTECH SYSTEMS INC 8-K 2024-03-06 AZ 000-11412 86-0411215 131 S. Clark Drive Tempe AZ 85288 (480) 967-5146 Not Applicable false false false false Common Stock, par value $0.01 per share ASYS NASDAQ false