0000950170-24-025892.txt : 20240305 0000950170-24-025892.hdr.sgml : 20240305 20240305160852 ACCESSION NUMBER: 0000950170-24-025892 CONFORMED SUBMISSION TYPE: 8-K PUBLIC DOCUMENT COUNT: 13 CONFORMED PERIOD OF REPORT: 20240301 ITEM INFORMATION: Changes in Registrant's Certifying Accountant ITEM INFORMATION: Financial Statements and Exhibits FILED AS OF DATE: 20240305 DATE AS OF CHANGE: 20240305 FILER: COMPANY DATA: COMPANY CONFORMED NAME: AMTECH SYSTEMS INC CENTRAL INDEX KEY: 0000720500 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 860411215 STATE OF INCORPORATION: AZ FISCAL YEAR END: 0930 FILING VALUES: FORM TYPE: 8-K SEC ACT: 1934 Act SEC FILE NUMBER: 000-11412 FILM NUMBER: 24720375 BUSINESS ADDRESS: STREET 1: 131 SOUTH CLARK DRIVE CITY: TEMPE STATE: AZ ZIP: 85288 BUSINESS PHONE: 4809675146 MAIL ADDRESS: STREET 1: 131 SOUTH CLARK DRIVE CITY: TEMPE STATE: AZ ZIP: 85288 FORMER COMPANY: FORMER CONFORMED NAME: QUARTZ ENGINEERING & MATERIALS INC DATE OF NAME CHANGE: 19870715 8-K 1 asys-20240301.htm 8-K 8-K
false0000720500AMTECH SYSTEMS INC00007205002024-03-012024-03-01

 

UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549

 

FORM 8-K

 

CURRENT REPORT

Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

Date of Report (Date of earliest event reported): March 01, 2024

 

 

Amtech Systems, Inc.

(Exact name of Registrant as Specified in Its Charter)

 

 

Arizona

000-11412

86-0411215

(State or Other Jurisdiction
of Incorporation)

(Commission File Number)

(IRS Employer
Identification No.)

 

 

 

 

 

131 S. Clark Drive

 

Tempe, Arizona

 

85288

(Address of Principal Executive Offices)

 

(Zip Code)

 

Registrant’s Telephone Number, Including Area Code: (480) 967-5146

 

Not Applicable

(Former Name or Former Address, if Changed Since Last Report)

 

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:

Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))
Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

Securities registered pursuant to Section 12(b) of the Act:


Title of each class

 

Trading
Symbol(s)

 


Name of each exchange on which registered

Common Stock, par value $0.01 per share

 

ASYS

 

Nasdaq Global Select Market

Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (§ 230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§ 240.12b-2 of this chapter).

Emerging growth company

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.

 


Item 4.01 Changes in Registrant’s Certifying Accountant.

 

On March 1, 2024, Amtech Systems, Inc. (the “Company”), upon the approval of the Audit Committee (the “Committee”) of the Board of Directors of the Company, notified Grant Thornton LLP (“Grant Thornton”), the Company’s current independent registered public accounting firm, that it would be dismissed from that position effective March 1, 2024.

 

The audit reports of Grant Thornton on the Company’s consolidated financial statements as of and for the years ended September 30, 2023 and 2022 did not contain any adverse opinion or disclaimer of opinion, nor were they qualified or modified as to uncertainty, audit scope, or accounting principles. During the Company’s two most recent fiscal years ended September 30, 2023 and 2022 and quarterly period ended December 31, 2023, there were no (1) disagreements with Grant Thornton on any matter of accounting principles or practices, financial statement disclosures, or auditing scope or procedures, which disagreements, if not resolved to the satisfaction of Grant Thornton, would have caused Grant Thornton to make reference to the subject matter of the disagreements in connection with its reports; and (2) events of the type listed in paragraphs (A) through (D) of Item 304(a)(1)(v) of Regulation S-K, except that, Grant Thornton issued an adverse opinion in their report on internal control over financial reporting as of September 30, 2023 as a result of the material weaknesses in the Company’s internal control over financial reporting previously reported in Part II, Item 9A “Controls and Procedures” in the Company’s Annual Report on Form 10-K for the year ended September 30, 2023 described therein (the “2023 10-K”). The material weaknesses (1) related to ineffective information technology general controls in the areas of user access, segregation of duties, and program change-management over information technology systems that support substantially all of the Company’s financial reporting processes and (2) because the Company did not design and maintain adequate internal controls over non-routine and complex transactions, including the preparation and review of the third-party service provider valuation report in the areas of goodwill and intangible assets. Internal controls in place were not operating effectively to prevent and detect a material misstatement. The Company has established plans to remediate these material weaknesses outlined in the 2023 10-K.

 

The Company provided Grant Thornton with a copy of this Current Report on Form 8-K prior to its filing with the Securities and Exchange Commission (“SEC”) and requested that Grant Thornton furnish the Company with a letter addressed to the SEC stating whether or not Grant Thornton agrees with the above statements. The letter from Grant Thornton is filed with this Current Report on Form 8-K as exhibit 16.1.

 

On March 1, 2024 the Committee appointed Klynveld Peat Marwick Goerdeler (“KPMG”) as the Company’s independent registered public accounting firm for the Company’s fiscal year ending September 30, 2024.

 

During the Company’s two most recent fiscal years ended September 30, 2023 and 2022 and quarterly period ended December 31, 2023, neither the Company nor anyone acting on its behalf consulted with KPMG regarding either: (i) the application of accounting principles to a specified transaction, either completed or proposed; or the type of audit opinion that might be rendered on the Company’s financial statements, and neither a written report nor oral advice was provided to the Company that was an important factor considered by the Company in reaching a decision as to the accounting, auditing or financial reporting issue; or (ii) any matter that was either the subject of a disagreement (as defined in paragraph (a)(1)(iv) of Item 304 of Regulation S-K and the related instructions thereto) or a reportable event (as described in paragraph (a)(1)(v) of Item 304 of Regulation S-K).

 

Item 9.01 Financial Statements and Exhibits.

 

d) Exhibits.

Exhibit No.

Description

16.1

Letter from Grant Thornton LLP, dated March 5, 2024

 

   104

 

Cover Page Interactive Data File (embedded within the Inline XBRL document)

 


SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.

 

 

 

AMTECH SYSTEMS, INC.

 

 

 

 

Date:

March 5, 2024

By:

/s/ Lisa D. Gibbs

 

 

 

Title: Vice President and Chief Financial Officer

 


EX-16.1 2 asys-ex16_1.htm EX-16.1 EX-16.1

March 5, 2024

 

U.S. Securities and Exchange Commission

Office of the Chief Accountant

100 F Street, NE

Washington, DC 20549

 

 

Re: Amtech Systems, Inc.

File No. 000-11412

 

Dear Sir or Madam:

 

We have read Item 4.01 of Form 8-K of Amtech Systems, Inc. dated March 5, 2024, and agree with the statements concerning our Firm contained therein.

 

Very truly yours,

 

/s/ GRANT THORNTON LLP


EX-101.SCH 3 asys-20240301.xsd XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT 100000 - Document - Document And Entity Information link:presentationLink link:calculationLink link:definitionLink Cover [Abstract] Amendment Flag City Area Code Document Period End Date Document Type Entity Address, Address Line One Entity Address, City or Town Entity Address, Postal Zip Code Entity Address, State or Province Entity Central Index Key Entity Emerging Growth Company Entity File Number Entity Incorporation, State or Country Code Entity Information, Former Legal or Registered Name Entity Registrant Name Entity Tax Identification Number Local Phone Number Pre-commencement Issuer Tender Offer Pre-commencement Tender Offer Title of 12(b) Security Security Exchange Name Soliciting Material Trading Symbol Written Communications XML 4 R1.htm IDEA: XBRL DOCUMENT v3.24.0.1
Document And Entity Information
Mar. 01, 2024
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date Mar. 01, 2024
Entity Registrant Name AMTECH SYSTEMS INC
Entity Central Index Key 0000720500
Entity Emerging Growth Company false
Entity File Number 000-11412
Entity Incorporation, State or Country Code AZ
Entity Tax Identification Number 86-0411215
Entity Address, Address Line One 131 S. Clark Drive
Entity Address, City or Town Tempe
Entity Address, State or Province AZ
Entity Address, Postal Zip Code 85288
City Area Code (480)
Local Phone Number 967-5146
Entity Information, Former Legal or Registered Name Not Applicable
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, par value $0.01 per share
Trading Symbol ASYS
Security Exchange Name NASDAQ
EXCEL 6 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx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end XML 7 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 8 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 10 FilingSummary.xml IDEA: XBRL DOCUMENT 3.24.0.1 html 1 23 1 false 0 0 false 0 false false R1.htm 100000 - Document - Document And Entity Information Sheet http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation Document And Entity Information Cover 1 false false All Reports Book All Reports asys-20240301.htm asys-20240301.xsd http://xbrl.sec.gov/dei/2023 false false JSON 13 MetaLinks.json IDEA: XBRL DOCUMENT { "version": "2.2", "instance": { "asys-20240301.htm": { "nsprefix": "asys", "nsuri": "http://amtechsystems.com/20240301", "dts": { "inline": { "local": [ "asys-20240301.htm" ] }, "schema": { "local": [ "asys-20240301.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd", "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd", "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd", "https://xbrl.sec.gov/country/2023/country-2023.xsd", "https://xbrl.sec.gov/dei/2023/dei-2023.xsd" ] } }, "keyStandard": 23, "keyCustom": 0, "axisStandard": 0, "axisCustom": 0, "memberStandard": 0, "memberCustom": 0, "hidden": { "total": 3, "http://xbrl.sec.gov/dei/2023": 3 }, "contextCount": 1, "entityCount": 1, "segmentCount": 0, "elementCount": 24, "unitCount": 0, "baseTaxonomies": { "http://xbrl.sec.gov/dei/2023": 23 }, "report": { "R1": { "role": "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation", "longName": "100000 - Document - Document And Entity Information", "shortName": "Document And Entity Information", "isDefault": "true", "groupType": "document", "subGroupType": "", "menuCat": "Cover", "order": "1", "firstAnchor": { "contextRef": "C_4f983b12-ea74-41ad-bbd6-30a9935c5ff4", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "p", "body", "html" ], "reportCount": 1, "baseRef": "asys-20240301.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "C_4f983b12-ea74-41ad-bbd6-30a9935c5ff4", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "p", "body", "html" ], "reportCount": 1, "baseRef": "asys-20240301.htm", "first": true, "unique": true } } }, "tag": { "dei_AmendmentFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AmendmentFlag", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Amendment Flag", "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission." } } }, "auth_ref": [] }, "dei_CityAreaCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CityAreaCode", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "City Area Code", "documentation": "Area code of city" } } }, "auth_ref": [] }, "dei_CoverAbstract": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CoverAbstract", "lang": { "en-us": { "role": { "label": "Cover [Abstract]", "documentation": "Cover page." } } }, "auth_ref": [] }, "dei_DocumentPeriodEndDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentPeriodEndDate", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Period End Date", "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD." } } }, "auth_ref": [] }, "dei_DocumentType": { "xbrltype": "submissionTypeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentType", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Type", "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'." } } }, "auth_ref": [] }, "dei_EntityAddressAddressLine1": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine1", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line One", "documentation": "Address Line 1 such as Attn, Building Name, Street Name" } } }, "auth_ref": [] }, "dei_EntityAddressCityOrTown": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressCityOrTown", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, City or Town", "documentation": "Name of the City or Town" } } }, "auth_ref": [] }, "dei_EntityAddressPostalZipCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressPostalZipCode", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Postal Zip Code", "documentation": "Code for the postal or zip code" } } }, "auth_ref": [] }, "dei_EntityAddressStateOrProvince": { "xbrltype": "stateOrProvinceItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressStateOrProvince", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, State or Province", "documentation": "Name of the state or province." } } }, "auth_ref": [] }, "dei_EntityCentralIndexKey": { "xbrltype": "centralIndexKeyItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCentralIndexKey", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Central Index Key", "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK." } } }, "auth_ref": [ "r1" ] }, "dei_EntityEmergingGrowthCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityEmergingGrowthCompany", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Emerging Growth Company", "documentation": "Indicate if registrant meets the emerging growth company criteria." } } }, "auth_ref": [ "r1" ] }, "dei_EntityFileNumber": { "xbrltype": "fileNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFileNumber", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity File Number", "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen." } } }, "auth_ref": [] }, "dei_EntityIncorporationStateCountryCode": { "xbrltype": "edgarStateCountryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityIncorporationStateCountryCode", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Incorporation, State or Country Code", "documentation": "Two-character EDGAR code representing the state or country of incorporation." } } }, "auth_ref": [] }, "dei_EntityInformationFormerLegalOrRegisteredName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityInformationFormerLegalOrRegisteredName", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Information, Former Legal or Registered Name", "documentation": "Former Legal or Registered Name of an entity" } } }, "auth_ref": [] }, "dei_EntityRegistrantName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityRegistrantName", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Registrant Name", "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC." } } }, "auth_ref": [ "r1" ] }, "dei_EntityTaxIdentificationNumber": { "xbrltype": "employerIdItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityTaxIdentificationNumber", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Tax Identification Number", "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS." } } }, "auth_ref": [ "r1" ] }, "dei_LocalPhoneNumber": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "LocalPhoneNumber", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Local Phone Number", "documentation": "Local phone number for entity." } } }, "auth_ref": [] }, "dei_PreCommencementIssuerTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementIssuerTenderOffer", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Issuer Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act." } } }, "auth_ref": [ "r3" ] }, "dei_PreCommencementTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementTenderOffer", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act." } } }, "auth_ref": [ "r4" ] }, "dei_Security12bTitle": { "xbrltype": "securityTitleItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Security12bTitle", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Title of 12(b) Security", "documentation": "Title of a 12(b) registered security." } } }, "auth_ref": [ "r0" ] }, "dei_SecurityExchangeName": { "xbrltype": "edgarExchangeCodeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SecurityExchangeName", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Security Exchange Name", "documentation": "Name of the Exchange on which a security is registered." } } }, "auth_ref": [ "r2" ] }, "dei_SolicitingMaterial": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SolicitingMaterial", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Soliciting Material", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act." } } }, "auth_ref": [ "r5" ] }, "dei_TradingSymbol": { "xbrltype": "tradingSymbolItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "TradingSymbol", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Trading Symbol", "documentation": "Trading symbol of an instrument as listed on an exchange." } } }, "auth_ref": [] }, "dei_WrittenCommunications": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "WrittenCommunications", "presentation": [ "http://amtechsystems.com/20240301/taxonomy/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Written Communications", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act." } } }, "auth_ref": [ "r6" ] } } } }, "std_ref": { "r0": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b" }, "r1": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b-2" }, "r2": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "d1-1" }, "r3": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "13e", "Subsection": "4c" }, "r4": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "14d", "Subsection": "2b" }, "r5": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Section": "14a", "Number": "240", "Subsection": "12" }, "r6": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Securities Act", "Number": "230", "Section": "425" } } } ZIP 14 0000950170-24-025892-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0000950170-24-025892-xbrl.zip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end XML 15 asys-20240301_htm.xml IDEA: XBRL DOCUMENT 0000720500 2024-03-01 2024-03-01 false 0000720500 AMTECH SYSTEMS INC 8-K 2024-03-01 AZ 000-11412 86-0411215 131 S. Clark Drive Tempe AZ 85288 (480) 967-5146 Not Applicable false false false false Common Stock, par value $0.01 per share ASYS NASDAQ false