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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-020556
Filing Date
2023-05-10
Accepted
2023-05-10 16:18:59
Documents
76
Period of Report
2023-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q asys-20230331.htm   iXBRL 10-Q 2871007
2 EX-31.1 asys-ex31_1.htm EX-31 24105
3 EX-31.2 asys-ex31_2.htm EX-31 22899
4 EX-32.1 asys-ex32_1.htm EX-32 15069
5 EX-32.2 asys-ex32_2.htm EX-32 15115
6 GRAPHIC img250480385_0.jpg GRAPHIC 45889
  Complete submission text file 0000950170-23-020556.txt   10927273

Data Files

Seq Description Document Type Size
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT asys-20230331.xsd EX-101.SCH 59478
8 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT asys-20230331_pre.xml EX-101.PRE 388285
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT asys-20230331_cal.xml EX-101.CAL 76112
10 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT asys-20230331_def.xml EX-101.DEF 205919
11 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT asys-20230331_lab.xml EX-101.LAB 490193
70 EXTRACTED XBRL INSTANCE DOCUMENT asys-20230331_htm.xml XML 2341547
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 23906675
SIC: 3559 Special Industry Machinery, NEC