Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

Name	Jurisdiction in which incorporated
Bruce Technologies, Inc	State of Massachusetts
BTU Europe Ltd.	United Kingdom
BTU International, Inc.	State of Delaware
BTU Ltd. (Shanghai)	China
BTU Overseas, Ltd.	State of Delaware
BTU Overseas (Shanghai) Co., Ltd.	China
Intersurface Dynamics, Inc.	State of Connecticut
P.R. Hoffman Machine Products, Inc.	State of Arizona
Tempress Systems, Inc.	State of Texas