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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-22-000375
Filing Date
2022-01-18
Accepted
2022-01-18 16:08:01
Documents
5
Period of Report
2022-03-02

Document Format Files

Seq Description Document Type Size
1 DEF 14A asys_def_14a_2022.htm DEF 14A 1140310
2 GRAPHIC img215434124_0.jpg GRAPHIC 45889
3 GRAPHIC img215434124_1.jpg GRAPHIC 6484
4 GRAPHIC img215434124_2.jpg GRAPHIC 470794
5 GRAPHIC img215434124_3.jpg GRAPHIC 270930
  Complete submission text file 0000950170-22-000375.txt   2229745
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: DEF 14A | Act: 34 | File No.: 000-11412 | Film No.: 22535258
SIC: 3559 Special Industry Machinery, NEC