8-K

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 8-K

                             CURRENT REPORT PURSUANT
                          TO SECTION 13 OR 15(d) OF THE
                         SECURITIES EXCHANGE ACT OF 1934


         Date of Report (Date of earliest event reported): July 11, 2002


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


           Arizona                                               86-0411215
(State or other jurisdiction of                               (I.R.S. Employer
 incorporation or organization)                              Identification No.)


 131 South Clark Drive, Tempe, Arizona                              85281
(Address of principal executive offices)                         (Zip code)


                                  480-967-5146
              (Registrant's telephone number, including area code)

ITEM 4. CHANGE IN REGISTRANT'S CERTIFYING ACCOUNTANT.

     On July 3, 2002, Amtech Systems, Inc. ("Amtech" or the "Corporation")
dismissed its independent auditor, Arthur Andersen LLP ("Andersen") and
appointed KPMG LLP ("KPMG") as its new independent auditor. As of the date of
this report, KPMG is in the process of its standard client evaluation procedure
and has not accepted the engagement. These actions were approved by the
Corporation's Board of Directors upon the recommendation of its Audit Committee.
It is intended that KPMG will review the consolidated financial statements of
the Corporation for the quarter ending June 30, 2002 and will audit the
consolidated financial statements of the Corporation for the fiscal year ending
September 30, 2002.

     During the two most recent fiscal years ended September 30, 2001 and 2000,
and the subsequent interim periods through the date of this report, there were
no disagreements between the Corporation and Andersen, as defined in Item 304 of
Regulation S-K, on any matter of accounting principles or practices, financial
statement disclosure, or auditing scope or procedure, which disagreements, if
not resolved to Andersen's satisfaction, would have caused Andersen to make
reference to the subject matter of such disagreement in connection with its
reports, and there were no reportable events as described under Item
304(a)(1)(v) of Regulation S-K.

     The audit reports of Andersen on the consolidated financial statements of
Amtech for each of the fiscal years ended September 30, 2001 and 2000 did not
contain an adverse opinion or disclaimer of opinion, nor were they qualified or
modified as to uncertainty, audit scope or accounting principles.

     During the fiscal years ended September 30, 2001 and 2000, and the
subsequent interim periods through the date of this report, neither the
Corporation nor anyone on its behalf consulted with KPMG regarding the
application of accounting principles to a specified transaction, either
completed or proposed, or the type of audit opinion that might be rendered on
the Corporation's consolidated financial statements, or any other matters or
reportable events set forth in Items 304(a)(2)(i) and (ii) of Regulation S-K.

     Amtech has provided Andersen with a copy of the foregoing disclosures.
Andersen has advised the Corporation that as of July 1, 2002, it is no longer
issuing any letters to the Securities and Exchange Commission regarding matters
such as these.

ITEM 7. FINANCIAL STATEMENTS AND EXHIBITS.

     (a) Inapplicable
     (b) Inapplicable
     (c) Exhibits:

           99       Press release of Amtech Systems, Inc. dated July 11, 2002

                                    SIGNATURE

     Pursuant to the requirements of the Securities Exchange Act of 1934, the
Registrant has duly caused this report to be signed on its behalf by the
undersigned thereunto duly authorized.

                                        AMTECH SYSTEMS, INC.
                                        (Registrant)

Date: July 11, 2002                     By: /s/ Robert T. Hass
                                            --------------------------------
                                            Robert T. Hass
                                            Vice President - Finance

                                  EXHIBIT INDEX

Exhibit Number         Description of Exhibit
- --------------         ----------------------

     99                Press Release of Amtech Systems, Inc. dated July 11, 2002

EX-99

                                                                      Exhibit 99


FOR IMMEDIATE RELEASE
Contact: Robert T. Hass, CFO
         (480) 967-5146

            AMTECH SYSTEMS INC. APPOINTS KPMG AS INDEPENDENT AUDITOR

     Tempe, AZ--July 11, 2002 -- Amtech Systems, Inc. (Nasdaq_NM: ASYS)
("Amtech" or the "Company") announced that its board of directors has appointed
KPMG LLP ("KPMG") as the Company's independent auditor for the fiscal year
ending September 30, 2002. KPMG replaces Arthur Andersen LLP and the change is
effective immediately. KPMG is in the process of completing its standard client
evaluation procedures and has not yet accepted the engagement. The selection of
KPMG was made after careful consideration of several top-ranked public
accounting firms by Amtech's board of directors, its audit committee and its
management.

     For more information regarding Amtech's change of auditors, please refer to
the Company's Form 8-K filing with the Securities and Exchange Commission.

     Amtech Systems, Inc. manufactures capital equipment, including silicon
wafer handling automation, semiconductor processing equipment and related
consumables used in fabricating semiconductor devices.