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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950147-02-000125
Filing Date
2002-01-28
Accepted
2002-01-28 00:00:00
Documents
1
Period of Report
2002-03-29

Document Format Files

Seq Description Document Type Size
1 DEFINITIVE N&PS OF AMTECH SYSTEMS e-8016.txt DEF 14A 74383
  Complete submission text file 0000950147-02-000125.txt   75939
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: DEF 14A | Act: 34 | File No.: 000-11412 | Film No.: 02519323
SIC: 3559 Special Industry Machinery, NEC