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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0000950147-02-000062
Filing Date
2002-01-15
Accepted
2002-01-15 00:00:00
Documents
4
Effectiveness Date
2002-01-15

Document Format Files

Seq Description Document Type Size
1 FORM S-8 OF AMTECH SYSTEMS e-7979.txt S-8 18609
3 1998 AMENDED STOCK OPTION PLAN ex-4.txt EX-4 35759
4 FORM OF OPINION & CONSENT OF SQUIRE, SANDERS & D. ex-5.txt EX-5 1856
5 CONSENT OF ARTHUR ANDERSEN LLP ex32-1.txt EX-23.1 550
  Complete submission text file 0000950147-02-000062.txt   58699
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: S-8 | Act: 33 | File No.: 333-76812 | Film No.: 2510765
SIC: 3559 Special Industry Machinery, NEC