<SEC-DOCUMENT>0000906304-15-000017-index.html : 20150105 <SEC-HEADER>0000906304-15-000017.hdr.sgml : 20150105 <ACCEPTANCE-DATETIME>20150105130522 ACCESSION NUMBER: 0000906304-15-000017 CONFORMED SUBMISSION TYPE: SC 13G PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20150105 DATE AS OF CHANGE: 20150105 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AMTECH SYSTEMS INC CENTRAL INDEX KEY: 0000720500 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 860411215 STATE OF INCORPORATION: AZ FISCAL YEAR END: 0930 FILING VALUES: FORM TYPE: SC 13G SEC ACT: 1934 Act SEC FILE NUMBER: 005-39482 FILM NUMBER: 15503451 BUSINESS ADDRESS: STREET 1: 131 S CLARK DR CITY: TEMPE STATE: AZ ZIP: 85281 BUSINESS PHONE: 6029675146 MAIL ADDRESS: STREET 1: 131 SOUTH CLARK DRIVE CITY: TEMPE STATE: AZ ZIP: 85281 FORMER COMPANY: FORMER CONFORMED NAME: QUARTZ ENGINEERING & MATERIALS INC DATE OF NAME CHANGE: 19870715 FILED BY: COMPANY DATA: COMPANY CONFORMED NAME: ROYCE & ASSOCIATES LLC CENTRAL INDEX KEY: 0000906304 IRS NUMBER: 522343049 STATE OF INCORPORATION: DE FISCAL YEAR END: 0331 FILING VALUES: FORM TYPE: SC 13G BUSINESS ADDRESS: STREET 1: 745 FIFTH AVENUE CITY: NEW YORK STATE: NY ZIP: 10151 BUSINESS PHONE: 212-508-4500 MAIL ADDRESS: STREET 1: 745 FIFTH AVENUE CITY: NEW YORK STATE: NY ZIP: 10151 FORMER COMPANY: FORMER CONFORMED NAME: ROYCE & ASSOCIATES INC /NY DATE OF NAME CHANGE: 19990329 FORMER COMPANY: FORMER CONFORMED NAME: QUEST ADVISORY CORP/NY DATE OF NAME CHANGE: 19970805 </SEC-HEADER> <DOCUMENT> <TYPE>SC 13G <SEQUENCE>1 <FILENAME>asys.txt <TEXT> Document 1 - file: asys.txt
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