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Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0000902219-07-000625
Filing Date
2007-02-14
Accepted
2007-02-14 11:06:53
Documents
1

Document Format Files

Seq Description Document Type Size
1 SEC FILING sec_filing.htm SC 13G 17675
  Complete submission text file 0000902219-07-000625.txt   19762
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G | Act: 34 | File No.: 005-39482 | Film No.: 07614969
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 75 STATE STREET BOSTON MA 02109
Business Address 75 STATE STREET BOSTON MA 02109 6179515000
WELLINGTON MANAGEMENT CO LLP (Filed by) CIK: 0000902219 (see all company filings)

IRS No.: 042683227 | State of Incorp.: MA | Fiscal Year End: 1231
Type: SC 13G
SIC: 0000