Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

Name	Jurisdiction in which incorporated
Tempress Systems, Inc.	State of Texas
Tempress Group Holding BV	The Netherlands
Tempress Holdings BV	The Netherlands
Tempress Systems BV	The Netherlands
Tempress Manufacturing BV	The Netherlands
Tempress Engineering BV	The Netherlands
Tempress Onroerend Goed BV	The Netherlands
Tempress IP BV	The Netherlands
Tempress Asia Holding BV	The Netherlands
Tempress Hong Kong Limited	Hong Kong
P.R. Hoffman Machine Products, Inc	State of Arizona
Bruce Technologies, Inc	State of Massachusetts
Bruce Technologies Europe GmbH	Federal Republic of Germany
R2D Automation SAS	France
Amtech Tempress New Energy Technologies Limited	China
BTU International, Inc.	State of Delaware
BTU Overseas, Ltd.	State of Delaware
BTU Europe Ltd.	State of Delaware
BTU Overseas (Shanghai) Co., Ltd	State of Delaware
BTU Ltd. (Shanghai)	State of Delaware
SoLayTec B.V.	The Netherlands