Acquisitions - Consideration Transferred (Details) - BTU International, Inc (BTU) Merger $ / shares in Units, shares in Thousands, $ in Thousands	Jan. 30, 2015 USD ($) $ / shares shares
Business Acquisition [Line Items]
Exchange ratio	0.3291
Amtech common stock issued for consideration	3,186
Amtech common stock per share price on January 30, 2015 \| $ / shares	$ 8.20
Consideration for BTU common shares and restricted stock units \| $	$ 26,125
Total fair value of consideration transferred \| $	$ 26,625
Common And Restricted Shares
Business Acquisition [Line Items]
BTU common shares and restricted stock units exchanged	9,681
Vested BTU stock options exchanged for Amtech stock options	9,681
Stock Options
Business Acquisition [Line Items]
BTU common shares and restricted stock units exchanged	500
Vested BTU stock options exchanged for Amtech stock options	500

Business Combination, Consideration Transferred For Common And Restricted Stock Units

No definition available.

Name:	asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Conversion Of Stock, Conversion Ratio, Shares Of Stock Exchanged Per Each Share Of Subsidiary Stock

+ References

No definition available.

+ Details

Name:	asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock
Namespace Prefix:	asys_
Data Type:	xbrli:pureItemType
Balance Type:	na
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 30
-Paragraph 7
-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6578-128477

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 30
-Paragraph 8
-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6613-128477

+ Details

Name:	us-gaap_BusinessCombinationConsiderationTransferred1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The number of shares converted in a noncash (or part noncash) transaction. Noncash is defined as transactions during a period that do not result in cash receipts or cash payments in the period. "Part noncash" refers to that portion of the transaction not resulting in cash receipts or cash payments in the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4332-108586

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 3
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4304-108586

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4313-108586

+ Details

Name:	us-gaap_ConversionOfStockSharesConverted1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

- Definition

The number of shares issued as [noncash or part noncash] consideration for a business or asset acquired. Noncash is defined as transactions during a period that affect recognized assets or liabilities but that do not result in cash receipts or cash payments in the period. "Part noncash" refers to that portion of the transaction not resulting in cash receipts or cash payments in the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 3
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4304-108586

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4332-108586

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 50
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=6367179&loc=d3e4313-108586

+ Details

Name:	us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

- Definition

Price of a single share of a number of saleable stocks of a company.

+ References

No definition available.

+ Details

Name:	us-gaap_SharePrice
Namespace Prefix:	us-gaap_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	instant

- Details

Name:	us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementClassOfStockAxis=asys_CommonAndRestrictedSharesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementClassOfStockAxis=us-gaap_EmployeeStockOptionMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: