Earnings Per Share (Tables)

6 Months Ended

Mar. 31, 2016

Earnings Per Share [Abstract]

Schedule of Earnings Per Share, Basic and Diluted

The following table outlines basic and diluted EPS:

	Three Months Ended March 31,						Six Months Ended March 31,
	2016			2015			2016			2015
	(in thousands, except per share amounts)						(in thousands, except per share amounts)
Basic Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(1,499	)	$	(2,321	)	$	(5,513	)	$	(7,515	)
Weighted Average Shares Outstanding:
Common stock	13,169			11,997			13,161			10,914
Basic loss per share attributable to Amtech shareholders	$	(0.11	)	$	(0.19	)	$	(0.42	)	$	(0.69	)
Diluted Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(1,499	)	$	(2,321	)	$	(5,513	)	$	(7,515	)
Weighted Average Shares Outstanding:
Common stock	13,169			11,997			13,161			10,914
Diluted shares	13,169			11,997			13,161			10,914
Diluted loss per share attributable to Amtech shareholders	$	(0.11	)	$	(0.19	)	$	(0.42	)	$	(0.69	)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.