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This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities.

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- Definition

Amount of intangible assets, excluding goodwill, acquired at the acquisition date.

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- Definition

Amount recognized as of the acquisition date for the identifiable assets acquired in excess of (less than) the aggregate liabilities assumed.

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Amount recognized for assets, including goodwill, in excess of (less than) the aggregate liabilities assumed.

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Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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No definition available.

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- Definition

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination.

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Acquisition - Assets Acquired and Liabilities Assumed (Details) (USD $)	6 Months Ended	3 Months Ended		6 Months Ended
	Mar. 31, 2015	Mar. 31, 2015	Mar. 31, 2014	Mar. 31, 2014	Sep. 30, 2014	Jan. 30, 2015
Business Acquisition [Line Items]
Goodwill	$ 14,596,000us-gaap_Goodwill	$ 14,596,000us-gaap_Goodwill			$ 8,323,000us-gaap_Goodwill
Goodwill recognized due to acquisitions	6,619,000us-gaap_GoodwillAcquiredDuringPeriod
BTU International, Inc (BTU) Merger
Business Acquisition [Line Items]
Fair value of net tangible assets acquired						20,948,000
Goodwill						4,347,000
Identifiable intangible assets						1,330,000
Total consideration allocated						26,625,000
Transaction-related costs	2,000,000	800,000	100,000	100,000
Semiconductor
Business Acquisition [Line Items]
Goodwill	4,347,000	4,347,000			0
Goodwill recognized due to acquisitions	4,347,000
Semiconductor \| BTU International, Inc (BTU) Merger
Business Acquisition [Line Items]
Goodwill recognized due to acquisitions	$ 4,300,000
Trade names
Business Acquisition [Line Items]
Useful Life (in years)	15 years
Trade names \| BTU International, Inc (BTU) Merger
Business Acquisition [Line Items]
Useful Life (in years)	15 years